Results 191 to 200 of about 2,759 (235)
Some of the next articles are maybe not open access.
Characteristics of textured polishing wheels (TPW) for dry fixed abrasive polishing fused silica
Applied Optics, 2023Dry fixed abrasive process integrates chemical reaction and ductile removal into one process and shows advantages against the conventional loose abrasive polishing in efficiency, geometric controllability, and waste disposal. However, it is worth noting that the wear and cutting temperatures encountered during the dry fixed abrasive process are areas ...
Chaoxu, Chen, Wei, Yang, Fanwei, Zhu
openaire +2 more sources
Pattern density effects in fixed abrasive polishing
MRS Proceedings, 2002AbstractWe investigated pattern density effects during chemical mechanical planarization (CMP) for shallow trench isolation (STI) applications using fixed abrasive pads to better control the fixed abrasive polishing process. We observed that the polishing characteristics of higher pattern density features are strongly dependent on the presence of lower
Rajasekhar Venigalla +2 more
openaire +1 more source
Fixed Abrasive Lapping and Polishing of Hard Brittle Materials
Key Engineering Materials, 2010Fixed abrasive lapping and polishing (FALP) is a new machining technology and was adopted to manufacture hard brittle materials and obtain the high productivity because of fixed abrasive. The preparation process of fixed abrasive pad (FAP) was described. FALP of K9 glass, mobile panel glass and Si were investigated with fixed 5-10 µm diamond abrasives.
Jun Li +4 more
openaire +1 more source
On the removal of material along a polishing path by fixed abrasives
Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2002Material is removed when a surface is polished. This paper presents a model of the removal of material along a polishing path when a surface is polished by fixed abrasives. The proposed model assumes that the pressure distribution is Hertzian at the contact between the tool and the surface and the abrading rate follows the Archard wear law.
L Zhang +5 more
openaire +1 more source
Lapping and Polishing of Sapphire Wafer with Fixed Abrasive Pad
Advanced Materials Research, 2014The processing technology of sapphire with a high material removal rate a good surface quality is critical for its applications. The experiment of sapphire lapping and polishing was carried out by using three different fixed abrasive pad (FAP). Their material removal rate (MRR) and surface roughness (Ra) were measured and analyzed.
Jian Bin Wang +4 more
openaire +1 more source
Study on the Preparation Technology of Fixed Abrasive Polishing Pad in Chemical Mechanical Polishing
Applied Mechanics and Materials, 2014According to the shortcomings of the traditional free abrasive chemical mechanical polishing (CMP), in recent years, the fixed abrasive chemical mechanical polishing (FA-CMP) technology is proposed. It is a new planarization technology developed on the basis of the traditional CMP. Pad is an important and dispensable part in FA-CMP.
Zhi Xiang Liu +3 more
openaire +1 more source
Analysis of Path Distribution in Lapping and Polishing with Single Fixed Abrasive
Key Engineering Materials, 2013The path distribution can directly affect the machined workpiece surface quality in lapping and polishing, such as planeness, roughness, etc. In present paper, the influence of rotate speed ratio (RSR) and abrasive position on path distribution was analyzed with a single fixed abrasive.
Long Yuan Lu +4 more
openaire +1 more source
Analysis and improvement of the pad wear profile in fixed abrasive polishing
The International Journal of Advanced Manufacturing Technology, 2015Fixed abrasive polishing has some advantages in generating good planarization surfaces with low defects. The surfaces after polishing have better uniformity, and the material removal rate is much higher than that of the traditional chemical mechanical polishing using loose abrasives.
N. Y. Nguyen, Z. W. Zhong, Y. B. Tian
openaire +1 more source
Investigation of Eco-Friendly Fixed-Abrasive Polishing with Compact Robot
Advanced Materials Research, 2010Rising demand for sustainable development motivated our eco-friendly polishing method. In this study, fixed-abrasive polishing using a compact robot was proposed based on a new approach that includes the idea of secondary tools. The effectiveness of using a compact robot was investigated by life cycle assessment for eco-friendly polishing processing ...
Sachiko Ogawa +4 more
openaire +1 more source
Influence of fixed abrasive configuration on the polishing process of silicon wafers
The International Journal of Advanced Manufacturing Technology, 2016Lapping and polishing with fixed abrasives is an efficient method to flatten wafers and obtain mirror surface finish. One of the most concerned things is abrasive configuration for polishing pads in research. Researching on pad’s abrasive configuration will help get better wafer surface quality.
Congfu Fang +3 more
openaire +1 more source