Results 191 to 200 of about 2,578 (231)
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Fixed Abrasive Lapping and Polishing of Hard Brittle Materials
Key Engineering Materials, 2010Fixed abrasive lapping and polishing (FALP) is a new machining technology and was adopted to manufacture hard brittle materials and obtain the high productivity because of fixed abrasive. The preparation process of fixed abrasive pad (FAP) was described. FALP of K9 glass, mobile panel glass and Si were investigated with fixed 5-10 µm diamond abrasives.
Jun Li +4 more
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Lapping and Polishing of Sapphire Wafer with Fixed Abrasive Pad
Advanced Materials Research, 2014The processing technology of sapphire with a high material removal rate a good surface quality is critical for its applications. The experiment of sapphire lapping and polishing was carried out by using three different fixed abrasive pad (FAP). Their material removal rate (MRR) and surface roughness (Ra) were measured and analyzed.
Jian Bin Wang +4 more
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Study on the Preparation Technology of Fixed Abrasive Polishing Pad in Chemical Mechanical Polishing
Applied Mechanics and Materials, 2014According to the shortcomings of the traditional free abrasive chemical mechanical polishing (CMP), in recent years, the fixed abrasive chemical mechanical polishing (FA-CMP) technology is proposed. It is a new planarization technology developed on the basis of the traditional CMP. Pad is an important and dispensable part in FA-CMP.
Zhi Xiang Liu +3 more
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Analysis of Path Distribution in Lapping and Polishing with Single Fixed Abrasive
Key Engineering Materials, 2013The path distribution can directly affect the machined workpiece surface quality in lapping and polishing, such as planeness, roughness, etc. In present paper, the influence of rotate speed ratio (RSR) and abrasive position on path distribution was analyzed with a single fixed abrasive.
Long Yuan Lu +4 more
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Analysis and improvement of the pad wear profile in fixed abrasive polishing
The International Journal of Advanced Manufacturing Technology, 2015Fixed abrasive polishing has some advantages in generating good planarization surfaces with low defects. The surfaces after polishing have better uniformity, and the material removal rate is much higher than that of the traditional chemical mechanical polishing using loose abrasives.
N. Y. Nguyen, Z. W. Zhong, Y. B. Tian
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Mirror-Like Surface Finishing of PCD by Fixed Abrasive Polishing
Materials Science Forum, 2016Polycrystalline diamond (PCD) has excellent properties such as high hardness, high chemical inertness, high wear resistance and a low friction coefficient. Thus, it has been expected to be applied to used in various mechanical parts such as sliding parts.
Keishi Yamaguchi +5 more
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Influence of fixed abrasive configuration on the polishing process of silicon wafers
International Journal of Advanced Manufacturing Technology, 2016Lapping and polishing with fixed abrasives is an efficient method to flatten wafers and obtain mirror surface finish. One of the most concerned things is abrasive configuration for polishing pads in research. Researching on pad’s abrasive configuration will help get better wafer surface quality.
Zhao Zaixing +2 more
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Computer Simulation on the Motion Tracks of Ice Fixed Abrasives Polishing
Key Engineering Materials, 2010Ice fixed abrasives (IFA) polishing is a novel ultra-precision machining method. The motion tracks of abrasives during IFA polishing have an important effect on the quality of the machined silicon wafer. Firstly, the motion tracks of IFA polishing are theoretically analyzed in this paper.
Yu Li Sun +4 more
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FEM Simulation on the Temperature Distribution of Ice Fixed Abrasives Polishing
Key Engineering Materials, 2010The key question in the ice fixed abrasives (IFA) polishing is how to keep suitable ambient temperature in production process in order to avoid premature failure of the IFA. Based on above, the three dimensions finite element analysis (FEA) model of IFA polishing temperature field is built up at first.
Yu Li Sun +5 more
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Simulation on the Melting Rate of the Iced Fixed-Abrasive Polishing Plate
Key Engineering Materials, 2010The exchange of the heat of the IFA polishing system was analyzed at first in this paper. Then the three-dimensional temperature finite element model was set up. By changing the material of the elements, the ice-melting process was simulated. It was found that the obtained simulating results showed a good agreement with the experimental results.
Jing Kang +4 more
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