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Method for making gate-all-around (GAA) device including a superlattice

WEEKS KEITH DORAN, CODY NYLES WYNN, HYTHA MAREK, MEARS ROBERT J, STEPHENSON ROBERT JOHN, TAKEUCHI HIDEKI   +5 more
openaire   +1 more source

Characterization and Modeling of Gate-All-Around FET (GAA FET) for Low-Power and High- Performance Applications

exaly