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MEMS Gyroscopes as Physical Unclonable Functions
Proceedings of the 2016 ACM SIGSAC Conference on Computer and Communications Security, 2016A key requirement for most security solutions is to provide secure cryptographic key storage in a way that will easily scale in the age of the Internet of Things. In this paper, we focus on providing such a solution based on Physical Unclonable Functions (PUFs).
Oliver Willers +3 more
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Parametric amplification/damping in MEMS gyroscopes
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, 2011The attainable resolution of inertial sensors is ultimately limited by the cumulated noise level generated in both the mechanical domain (mechano-thermal noise) and the frontend of the electrical readout circuit, provided that deterministic errors, such as quadrature errors in the case of gyroscopes, are kept under control.
Mrigank Sharma +2 more
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Rotating and Gyroscopic MEMS Energy Scavenging
International Workshop on Wearable and Implantable Body Sensor Networks (BSN'06), 2006Extracting energy from motion and vibration is an attractive route to powering wireless sensors, and MEMS (microelectromechanical systems) technology is well suited to miniaturizing such generators. Most reported MEMS motion-driven scavengers use linear displacement, and have very restricted output power. Here two alternatives are proposed and analyzed:
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Background calibrated MEMS gyroscope
IEEE SENSORS 2014 Proceedings, 2014Burak Eminoglu +4 more
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Reliability Assessment of MEMS Gyroscope Sensor
Transactions of the Korean Society of Mechanical Engineers A, 2004Reliability of MEMS devices is receiving more attention as they are heading towards commercial production. In particular are the reliability and long-term stability of wafer level vacuum packaged MEMS gyroscope sensors subjected to cyclic mechanical stresses at high frequencies.
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Mechanical-thermal noise in MEMS gyroscopes
IEEE Sensors Journal, 2005We derive expressions for the effect of mechanical thermal noise on a vibrational microelectromechanical system gyroscope, including the angle of random walk, the noise equivalent rotation rate, and the spectral density of the noise component of the rate measurement.
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System for MEMS Gyroscope Testing
2016This paper presents fundamental information about an apparatus for tests on MEMS gyroscopes. Within the introductory section, the measurement system used to test MEMS gyroscopes at a Honeywell laboratory is characterized; the set-up comprises a Polytec MSA-500 analyzer, goniometers, and a controller.
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Vertical mems gyroscope by horizontal driving
The Journal of the Acoustical Society of America, 2006A vertical MEMS gyroscope by horizontal driving includes a substrate, a support layer fixed on an upper surface of an area of the substrate, a driving structure floating above the substrate and having a portion fixed to an upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a ...
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Acoustically Isolated MEMS Baw Gyroscopes
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023Diego Emilio Serrano +7 more
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