Results 131 to 140 of about 174,012 (205)

Design, Fabrication, and Experiment of a Decoupled Multi-Frame Vibration MEMS Gyroscope

IEEE Sensors Journal, 2021
A z-axis decoupled multi-frame vibration MEMS gyroscope (DMFVMG) is presented in this paper. Firstly, the decoupled principle is employed and the sense frame, Coriolis frame and drive frame are arranged through inner fame, intermediate frame and outer ...
Huiliang Cao, Qi Cai, Yingjie Zhang, Chong Shen, Yunbo Shi, Jun Liu   +5 more
semanticscholar   +1 more source

Surface acoustic wave MEMS gyroscope

Wave Motion, 2002
zbMATH Open Web Interface contents unavailable due to conflicting licenses.
Jose, K. A., Suh, W. D., Xavier, P. B., Varadan, V. K., Varadan, V. V.   +4 more
openaire   +2 more sources

A Digital Control Structure for Lissajous Frequency-Modulated Mode MEMS Gyroscope

IEEE Sensors Journal, 2022
This article proposes a digital control structure for a doubly decoupled gyroscope working in the Lissajous frequency-modulated (LFM) mode based on digital phase-locked loops (PLLs), which demodulates the angular rate signal directly from the readable ...
Xuetong Wang, Xudong Zheng, Yaojie Shen, Chenhao Xia, Guowen Liu, Zhonghe Jin, Zhipeng Ma   +6 more
semanticscholar   +1 more source

Microprocessing of MEMS gyroscopes

2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus), 2018
Application of laser radiation for materials microprocessing is widely used in various fields of science and technology today. The paper discusses the possibility of balancing the elements of MEMS gyroscope by using exposure for laser radiation. As a result of studying the parameters of the laser modification of silicon.
Lyudmila I. Dolgovykh, Sergey S. Evstafyev   +1 more
openaire   +1 more source

Staggered mode MEMS gyroscope

2016 Fourth International Japan-Egypt Conference on Electronics, Communications and Computers (JEC-ECC), 2016
This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency ...
Ashraf Mahmoud, Wael Fikry, Yasser M. Sabry, Mohamed A. E. Mahmoud   +3 more
openaire   +1 more source

Sensitivity Voltage Analysis for Piezoelectric MEMS Gyroscope using Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium titanate (BaTiO3)

International Conference on Computing: Theory and Applications, 2022
MEMS Gyroscopes are used in many life applications such as drones, automobiles, and robotics. It measures the angular rate with Coriolis force. The signal for the rotation rate of the MEMS gyroscope can be produced by measuring the lateral motion ...
Sherif A. Ghamry, Ahmed K. Mahmoud, R. Abdelrassoul, I. Morsi   +3 more
semanticscholar   +1 more source

The method of MEMS gyroscope random error compensation based on ARMA

Measurement science and technology, 2021
In order to suppress the random error of micro electro-mechanical system (MEMS) gyroscope, the method based on optimized auto regressive moving average (ARMA) model is proposed to solve problems such as poor extraction of trend items during signal ...
Mingkuan Ding, Zhiyong Shi, Binhan Du, Huaiguang Wang, L. Han, Zejun Cheng   +5 more
semanticscholar   +1 more source

Research on improving the north-seeking precision of MEMS gyroscope

Measurement science and technology, 2022
In order to improve the north-seeking precision of the micro-electro-mechanical system (MEMS) gyroscope, it is necessary to measure the earth’s rotation angular velocity accurately.
Dongning Guo, Chunhua Ren, Lu Zhang, F. Lu   +3 more
semanticscholar   +1 more source

Modeling a Novel MEMS Gyroscope

ECS Meeting Abstracts, 2012
Abstract not Available.
Nilgoon Zarei, Albert Leung, John Dewey Jones   +2 more
openaire   +1 more source

A Parametrically Amplified MEMS Gyroscope

Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT), 2010
The applicability of parametric amplification of either the primary and secondary vibration modes of a MEMS gyroscope, shown in Fig.1 is investigated experimentally in this paper. All control schemes have been implemented digitally onto a SHARC DSP development board.
Barry J. Gallacher, Z. X. Hu, J. S. Burdess, K. M. Harish   +3 more
openaire   +1 more source