Results 141 to 150 of about 174,012 (205)

MEMS-based hemispherical resonator gyroscopes

2012 IEEE Sensors, 2012
This paper introduces a fabrication technique that uses planar MEMS micromachining processes to produce hemispherical resonating shells for gyroscopes. The hemispheres exhibit a quality factor in excess of 20,000 with resonant frequencies in the range of 20 kHz for the 4-node wineglass mode.
P. Pai, F. K. Chowdhury, Carlos H. Mastrangelo, M. Tabib-Azar   +3 more
openaire   +1 more source

Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control

Journal of Micromechanics and Microengineering, 2021
The force-to-rebalance (FTR) closed-loop detection method is commonly used to expand the bandwidth (BW) for micro-electro-mechanical system (MEMS) gyroscopes with low-frequency split and high-quality factors.
Feng Bu, Bo Fan, Dacheng Xu, Shuwen Guo, Heming Zhao   +4 more
semanticscholar   +1 more source

Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error

Journal of Micromechanics and Microengineering, 2021
This work analyses circuit phase delay for carrier-modulation MEMS capacitive gyroscopes. The temperature-dependent circuit phase delay is a major source of gyroscope output drift, which deteriorates the gyroscope bias instability (BI) and angle random ...
Haibin Wu, Xudong Zheng, Xuetong Wang, Yaojie Shen, Zhong-he Jin, Zhipeng Ma   +5 more
semanticscholar   +1 more source

North finding with a single double mass MEMS gyroscope- A performance demonstrator

International Symposium on Switching, 2021
North-finders based on angular rate sensors have an advantage over magnetic compasses or GPS (global positioning system) as they are insensitive against local Earth magnetic field variations and independent of electromagnetic transmission.
D. Bülz, R. Forke, K. Hiller, S. Weidlich, S. Hahn, A. Shaporin, D. Wünsch, S. Konietzka, T. Motl, D. Billep, H. Kuhn   +10 more
semanticscholar   +1 more source

Digital Control and Readout of MEMS Gyroscope Using Second-Order Sliding Mode Control

IEEE Sensors Journal, 2022
Microelectromechanical system (MEMS) is a kind of MEMS that has been utilized to monitor the angular speed of moving objects on several occasions and has attracted the interest of several organizations across the globe.
Komal Kant, Rajan Kumar Paswan, I. Ahmad, Amar Prakash Sinha   +3 more
semanticscholar   +1 more source

Compact Standalone North-finding Device based on MEMS Gyroscope and Maytagging

Conference on Scientific Services & Internet, 2021
North-finders based on gyroscopes are commonly used because of their robustness against local Earth magnetic field distortion and independence of electromagnetic transmission.
D. Bulz, S. Weidlich, S. Konietzka, T. Motl, Alexey Shaporin, R. Forke, K. Hiller, H. Kuhn   +7 more
semanticscholar   +1 more source

System modeling of MEMS Gyroscopes

2007 Mediterranean Conference on Control & Automation, 2007
This paper presents a systematic approach to obtain governing equations of Micro Electro Mechanical Gyroscopes. The focus will be on vibratory type and its mechanical parameters, involved in modeling and designing, will be discussed due to their deep impact on overall performance of Gyroscopes.
Ramyar Rashed, H. Momeni
openaire   +1 more source

Frequency-Modulated MEMS Gyroscopes: A Review

IEEE Sensors Journal, 2021
As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based on MEMS craft has attracted more and more attention in recent years, owing to its advantages in low power consumption, low temperature sensitivity, very high bandwidth, and excellent scale factor stability.
Xingjing Ren, Xin Zhou, Sheng Yu, Xuezhong Wu, Dingbang Xiao   +4 more
openaire   +1 more source

100 kHz MEMS Vibratory Gyroscope

Journal of Microelectromechanical Systems, 2013
The behavior of MEMS rate gyroscopes depends on the sensor's resonance frequency f0. Key features like robustness against external vibrations and ease of integration can be optimized by increasing f0. We designed and fabricated a device with f0=100 kHz for experimental and theoretical investigation of MEMS vibratory gyroscopes with increased f0.
Jan-Timo Liewald, Burkhard Kuhlmann, Thorsten Balslink, Martin Trachtler, Matthias Dienger, Yiannos Manoli   +5 more
openaire   +1 more source

High Performance MEMS Thermal Gyroscope

Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B, 2012
This paper reports modeling a new design of Thermal MEMS gyroscope through the use of the Comsol Multiphysics software package. Being very small and having no movable parts have made thermal MEMS gyroscope very practical. Previously designed Thermal MEMS gyroscope shows some limitation such as being vulnerable to gravity force.
Nilgoon Zarei, Albert M. Leung, John D. Jones   +2 more
openaire   +1 more source