Results 151 to 160 of about 174,012 (205)

A DRIE CMOS-MEMS gyroscope

Proceedings of IEEE Sensors, 2003
The gyroscope reported in this paper is a lateral-axis angular rate sensor with in-plane vibration and out-of-plane Coriolis acceleration sensing. The sensor plus on-chip CMOS circuitry is about 1 mm by 1 mm in size and is fabricated by a post-CMOS micromachining process that uses interconnect metal layers as etching mask(s) and a single-crystal ...
null Huikai Xie, G.K. Fedder
openaire   +1 more source

Pole-Zero Temperature Compensation Circuit Design and Experiment for Dual-Mass MEMS Gyroscope Bandwidth Expansion

IEEE/ASME transactions on mechatronics, 2019
This paper presents a bandwidth expansion method for dual-mass microelectromechanical system (MEMS) gyroscopes based on the pole–zero temperature compensation method.
Huiliang Cao, Yingjie Zhang, Ziqi Han, Xingling Shao, Jinyang Gao, Kun Huang, Yunbo Shi, Jun Tang, Chong Shen, Jun Liu   +9 more
semanticscholar   +1 more source

MEMS TECHNOLOGIES FOR NOVEL GYROSCOPES

2023
Gyroscopes have become an integral part of many application spaces ranging from consumer electronics to navigation. As navigation and movement tracking becomes necessary through inertial measurement units (that comprises gyroscopes and accelerometers) in myriad of scenarios especially when global navigation and satellite system (GNSS) is not available,
openaire   +1 more source

Drift Error Calibration Method Based on Multi-MEMS Gyroscope Data Fusion

International Journal of Precision Engineering and Manufacturing, 2023
Tong Wang, Sheng Zhong, Hangzai Luo, Nailiang Kuang   +3 more
semanticscholar   +1 more source

Active disturbance rejection control for MEMS gyroscopes

2008 American Control Conference, 2008
A new control method is presented to drive the drive axis of a MEMS gyroscope to resonance and regulate the output amplitude of the axis to a fixed level. It is based on a unique active disturbance rejection control (ADRC) strategy, which actively estimates and compensates for internal dynamic changes of the plant and external disturbances in real time.
null Qing Zheng, null Lili Dong, null Dae Hui Lee, null Zhiqiang Gao   +3 more
openaire   +1 more source

Design of MEMS gyroscope interface ASIC with on-chip temperature compensation

Measurement, 2023
Huan Zhang, Weiping Chen, Liang Yin, Q. Fu   +3 more
semanticscholar   +1 more source

Adaptive controller design of MEMS gyroscopes

ITSC 2001. 2001 IEEE Intelligent Transportation Systems. Proceedings (Cat. No.01TH8585), 2002
An angular rate-sensing scheme for z-axis MEMS oscillatory gyroscopes, which is based on observer-based adaptive control, is presented. The proposed observer based adaptive control scheme estimates the component of the angular velocity vector (z-axis), which is orthogonal to the plane of oscillation of the gyroscope, as well as compensates friction ...
null Sungsu Park, R. Horowitz, null Chin-Woo Tan   +2 more
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Fractional robust data-driven control of nonlinear MEMS gyroscope

Nonlinear dynamics, 2023
Mehran Rahmani, S. Redkar
semanticscholar   +1 more source

Origins and Mechanisms of Bias Instability Noise in a Three-Axis Mode-Matched MEMS Gyroscope

Journal of microelectromechanical systems, 2019
In this paper, we examine the origins of bias instability in three-axis, mode-matched MEMS gyroscopes. Reducing this drift phenomenon is crucial for highly accurate navigation in applications, such as automated driving or indoor localization.
T. Hiller, Zsigmond Péntek, J. Liewald, A. Buhmann, H. Roth   +4 more
semanticscholar   +1 more source

Study on MEMS tunneling effect gyroscope

2009 IEEE International Symposium on Industrial Electronics, 2009
A new structure of tunneling gyroscope which is high-accuracy and low-range was presented in this paper, as well as the structure and the operating principles of this gyroscope were analyzed. Besides, the simulations were made in this paper which is close to the principle. Then the structure was fabricated by MEMS technological processes.
null Shi Yunbo, null Zhang Qiong, null Li Junhong, null Tong Xiaogang, null Ma Zongmin, null Liu Jun   +5 more
openaire   +1 more source