Results 161 to 169 of about 11,414 (169)
Some of the next articles are maybe not open access.
Non-silicon MEMS platforms for gas sensors
Sensors and Actuators B: Chemical, 2016Leandro Lorenzelli, Andrey Legin
exaly
A BioMEMS Review: MEMS Technology for Physiologically Integrated Devices
Proceedings of the IEEE, 2004exaly
Frequency modulation MEMS triaxial gyroscope
2017A. Tocchio, L. Falorni, C. Comi, V. Zega
openaire +1 more source
Advances of materials science in MEMS applications: A review
Results in EngineeringMd Hosne Mobarak
exaly

