Results 131 to 140 of about 2,189 (167)

Next-Gen Healthcare Devices: Evolution of MEMS and BioMEMS in the Era of the Internet of Bodies for Personalized Medicine. [PDF]

Micromachines (Basel)
Marinescu MR, Ionescu ON, Pachiu CI, Dinescu MA, Muller R, Șuchea MP.   +5 more
europepmc   +1 more source

Vibro-Acoustic Signatures of Various Insects in Stored Products. [PDF]

Sensors (Basel)
Kadyrov D, Sutin A, Sedunov N, Sedunov A, Salloum H.   +4 more
europepmc   +1 more source

Capacitive Accelerometer Interfaces Utilising High-Q Micromechanical Sensor Elements

, 2013
openaire   +2 more sources

Some of the next articles are maybe not open access.

Related searches:

Development of a Micromechanical Accelerometer

2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus), 2021
The article describes the developed design of the sensing element of a micromechanical accelerometer, provides the results of modeling: modal analysis, analysis under the static effect of acceleration, calculated changes in the main parameters of the accelerometer when the temperature changes.
Mikhail D. Kochergin, Stepan A. Anchutin, Nikolay M. Zaryankin, Elena S. Kochurina, Victor V. Kalugin   +4 more
openaire   +1 more source

An electrostatically rebalanced micromechanical accelerometer

Guidance, Navigation and Control Conference, 1989
This paper discusses the results of testing a micromechanical accelerometer with integral electrodes. It is suitable for use with the CSDL micromechanical gyro, previously described in last years' conference, (Ref. 1) and could be fabricated on the same chip. The accelerometer has a capacitive sensor and electrostatic torquer.
BURTON BOXENHORN, PAUL GREIFF
openaire   +1 more source

Development of a Sensitive Element of a Micromechanical Accelerometer

Russian Microelectronics, 2022
Micromechanical accelerometers have wide range of applications in industry and robotechnics due to the main advantages such like low power consumption, small dimensions and weight, low cost in serial production. Therefore, micromechanical accelerometers research and development received priority.
E. S. Kochurina, S. A. Anchutin, V. V. Kalugin, N. M. Zaryankin, A. S. Timoshenkov, I. S. Dernov   +5 more
openaire   +1 more source

Design of a micromechanical accelerometer

2018 25th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS), 2018
Stages of design of a sensing element with an electrode structure, and an integrated circuit of a micromechanical accelerometer, starting from a system model and a circuit level, and ending with the development of topology, are considered. The results of testing the accelerometer main components, such as sensing element and integrated circuit, and the ...
Ya.V. Belyaev, A. A. Belogurov, A. N. Bocharov, D. V. Kostygov, I. V. Lemko, A. A. Mihteeva, A. V. Yakimova, N. N. Nevirkovets, N. M. Chernetskaya   +8 more
openaire   +1 more source

Optimization of micromechanical accelerometer structures

Measurement Techniques, 2011
This article demonstrates the feasibility of optimizing the choice of known measurement circuits using as a criterion the minimum value of a functional of the square of the difference between the ideal conversion function of the circuit being studied and a conversion function that includes the effect of parasitic semiconductor structures.
A. A. Papko, M. A. Kalinin, V. V. Alekseeva   +2 more
openaire   +1 more source

Micromechanical accelerometer integrated with MOS detection circuitry

IEEE Transactions on Electron Devices, 1982
A cantilever beam accelerometer is described in which the small cantilever sensing element is integrated with and fabricated alongside MOS detection circuitry. The total area of the detector/circuit combination is about 15000 µm2(24 mil2). Fully compatible and conventional materials and processing steps are employed throughout the fabrication schedule.
K.E. Petersen, A. Shartel, N.F. Raley
openaire   +1 more source