Results 271 to 279 of about 19,664 (279)

Curvilinear Optical Proximity Correction via Cardinal Spline

2025 62nd ACM/IEEE Design Automation Conference (DAC)
Su Zheng, Xiaoxiao Liang, Ziyang Yu 0001, Yuzhe Ma, Bei Yu 0001, Martin D. F. Wong   +5 more
openaire   +1 more source

Advanced Optical Proximity Correction (OPC) Techniques in Computational Lithography: Addressing the Challenges of Pattern Fidelity and Edge Placement Error

Global Journal of Medical Case Reports, 2022
exaly  

Improvements in patterning quality and fidelity in plasmonic lithography incorporating optical proximity correction

Optics and Laser Technology
Chin-Kai Chang
exaly  

Model-driven optical proximity correction via hypergraph convolutional neural networks and its experimental demonstration

Optics and Laser Technology
Shengen Zhang, Xu Ma, Fuli Wang
exaly  

Fast pixel-based optical proximity correction based on nonparametric kernel regression

Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2014
Xu Ma, Zhiyang Song, Shangliang Jiang
exaly  

A Review of DNN and GPU in Optical Proximity Correction

2024 2nd International Symposium of Electronics Design Automation (ISEDA)
Huming Zhu, Xiangyu Jiang, Delong Shu, Xinyue Cheng, Biao Hou, Hailong You   +5 more
openaire   +1 more source

248nm lithography of 2D photonic crystal waveguide with optical proximity correction

M B Yu, A Q Liu
exaly  

Optical proximity correction in geometry sensitive silicon photonics waveguide crossings

2017
exaly  

Identify Optical Proximity Correction (OPC) issue in 0.13 μm technology development

exaly