Results 261 to 270 of about 19,664 (279)

Data-Driven Approaches for Process Simulation and Optical Proximity Correction

Proceedings of the 28th Asia and South Pacific Design Automation Conference, 2023
Hao-Chiang Shao, Chia-Wen Lin, Shao-Yun Fang   +2 more
openaire   +1 more source

0.18 μm KrF lithography using optical proximity correction based on empirical behavior modeling

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1998
Kurt Ronse
exaly  

A fast and manufacture-friendly optical proximity correction based on machine learning

Microelectronic Engineering, 2017
Xu Ma, Shangliang Jiang, Zhiyang Song
exaly  

Improvement of optical proximity-effect correction model accuracy by hybrid optical proximity-effect correction modeling and shrink correction technique for 10-nm node process

Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2016
Scott Halle, Nicole Saulnier, Shoji Hotta   +2 more
exaly  

Fast optimization of defect compensation and optical proximity correction for extreme ultraviolet lithography mask

Optics Communications, 2019
Sikun Li
exaly  

Potential of phase-shifted optical proximity correction for 65 nm T-shaped pattern in high numerical aperture lithography

Journal of Vacuum Science & Technology B, 2008
Yanqiu Li, Li Yanqiu
exaly  

Fast aerial image simulations using one basis mask pattern for optical proximity correction

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 2011
Shiyuan Liu, Xiaofei Wu, Liu Shiyuan
exaly  

Optical proximity correction using holographic imaging technique

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 2014
Lawrence S Melvin
exaly  

Reducing the pattern redundancy in optical proximity correction modeling by analyzing the pattern linearity

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 2010
Qiliang Yan, Lawrence S Melvin
exaly  

Integrated Re-Fragmentation and Curve Correction for Curvilinear Optical Proximity Correction

2026 31st Asia and South Pacific Design Automation Conference (ASP-DAC)
Seohyun Kim, Shilong Zhang, Junha Jang, Youngsoo Shin   +3 more
openaire   +1 more source