Results 241 to 250 of about 19,199 (250)
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Optimization of optical proximity correction to reduce mask write time using genetic algorithm

2018
exaly  

Electrically driven optical proximity correction

2011
BANERJEE SHAYAK   +3 more
openaire   +1 more source

OPTICAL PROXIMITY CORRECTION FOR PHASE SHIFTING PHOTOLITHOGRAPHIC MASKS

2003
PIERRAT CHRISTOPHE, COTE MICHEL LUC
openaire   +2 more sources

Automatic optical proximity correction (OPC) rule generation

2004
SHI XUELONG, CHEN JANG FUNG
openaire   +2 more sources

Pattern matching optical proximity correction

2014
openaire   +1 more source

Reverse optical proximity correction method

2014
openaire   +1 more source

EDGE FRAGMENT CORRELATION DETERMINATION FOR OPTICAL PROXIMITY CORRECTION

2013
LEI JUNJIANG   +3 more
openaire   +2 more sources

Method and apparatus for mixed-mode optical proximity correction

2002
PIERRAT CHRISTOPHE   +4 more
openaire   +4 more sources

Mixed-mode optical proximity correction

2006
openaire   +1 more source

Method for correcting optical proximity effects

2011
openaire   +2 more sources
b2
a3
computational lithography
machine learning
inverse lithography technology
a1
optical proximity correction opc
u-net
lithography
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