Results 221 to 230 of about 19,199 (250)

Impact of scanner signatures on optical proximity correction

Proceedings of SPIE, 2010
Tomoyuki Matsuyama, Jacek K Tymiński
exaly  

Two threshold resist models for optical proximity correction

2004
Burn-Jeng Lin
exaly  

Optical proximity correction system

2000
YAMAMOTO KAZUKO, MIYAMA SACHIKO, KOYAMA KIYOMI, INOUE SOICHI   +3 more
openaire   +1 more source

Optical proximity correction method

1999
YAMAMOTO KAZUKO, MIYAMA SACHIKO, KOYAMA KIYOMI, INOUE SOICHI   +3 more
openaire   +1 more source

BULK IMAGE MODELING FOR OPTICAL PROXIMITY CORRECTION

2010
FAN YONGFA, ZHANG QIAOLIN, FALCH BRADLEY J   +2 more
openaire   +2 more sources

Improvements in patterning quality and fidelity in plasmonic lithography incorporating optical proximity correction

Optics and Laser Technology
Chin-Kai Chang
exaly  

Methods for defining evaluation points for optical proximity correction and optical proximity correction methods including same

2011
FUTRELL JOHN R C, RUSSELL EZEQUIEL VIDAL, STANTON WILLIAM A   +2 more
openaire   +2 more sources

METHOD OF VERIFYING ERROR OF OPTICAL PROXIMITY CORRECTION MODEL

2022
OH HEUNGSUK, KANG MINCHEOL, PARK SANGWOOK   +2 more
openaire   +2 more sources

Source imperfection impacts on optical proximity correction

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 2016
exaly  

Optical proximity correction method and system

1999
SAMUELS DONALD JAMES, WORDEMAN MATTHEW R
openaire   +1 more source