Results 221 to 230 of about 20,720 (256)

Optical proximity correction using holographic imaging technique

Journal of Vacuum Science & Technology B, 2014
Artak Isoyan
exaly  

Multivariable solver for optical proximity correction

2010
WONG WILLIAM S, CHEN BEEN-DER, LU YEN-WEN, LI JIANGWEI, NISHIBE TATSUO   +4 more
openaire   +5 more sources

Reducing the pattern redundancy in optical proximity correction modeling by analyzing the pattern linearity Available to Purchase

Journal of Vacuum Science & Technology B, 2010
Lawrence S Melvin, Jianliang Li
exaly  

Optical proximity correction with hierarchical Bayes model

Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2016
Bei Yu, David Z Pan
exaly  

Statistical optical proximity correction

2013
ZHOU WENZHAN, HSIA LIANG CHOO, ZHOU MEISHENG, ZOU ZHENG   +3 more
openaire   +1 more source

Optical proximity correction system

2000
YAMAMOTO KAZUKO, MIYAMA SACHIKO, KOYAMA KIYOMI, INOUE SOICHI   +3 more
openaire   +1 more source

Optical proximity correction method

1999
YAMAMOTO KAZUKO, MIYAMA SACHIKO, KOYAMA KIYOMI, INOUE SOICHI   +3 more
openaire   +1 more source

Improvements in patterning quality and fidelity in plasmonic lithography incorporating optical proximity correction

Optics and Laser Technology
Chin-Kai Chang
exaly  

Optical Proximity Corrections for Digital Micromirror Device-based Maskless Lithography

Journal of the Optical Society of Korea, 2012
Manseung Seo
exaly  

BULK IMAGE MODELING FOR OPTICAL PROXIMITY CORRECTION

2010
FAN YONGFA, ZHANG QIAOLIN, FALCH BRADLEY J   +2 more
openaire   +2 more sources