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Integrated Re-Fragmentation and Curve Correction for Curvilinear Optical Proximity Correction
2026 31st Asia and South Pacific Design Automation Conference (ASP-DAC)Seohyun Kim +3 more
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Electrical validation of through-process optical proximity correction verification limits
Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2010exaly
Pre-bias optical proximity correction
2010ROBLES JUAN ANDRES TORRES +3 more
openaire +2 more sources
Optical proximity correction using regression
2012GU ALLAN, ZAKHOR AVIDEH, GAO PEIRAN
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Novel methodology of employing scatterometry to assess optical proximity correction test pattern
2005exaly
Curvilinear Optical Proximity Correction via Cardinal Spline
2025 62nd ACM/IEEE Design Automation Conference (DAC)Su Zheng +5 more
openaire +1 more source

