Results 231 to 240 of about 20,720 (256)

Model-driven optical proximity correction via hypergraph convolutional neural networks and its experimental demonstration

Optics and Laser Technology
Gonzalo R. Arce, Shengen Zhang, Xu Ma
exaly  

Characterization and correction of optical proximity effects in deep‐ultraviolet lithography using behavior modeling Available to Purchase

Journal of Vacuum Science & Technology B, 1996
Kurt Ronse, Geert Vandenberghe, Anthony Yen   +2 more
exaly  

Fast pixel-based optical proximity correction based on nonparametric kernel regression

Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2014
Yanqiu Li, Xu Ma, Shangliang Jiang
exaly  

Methods for defining evaluation points for optical proximity correction and optical proximity correction methods including same

2011
FUTRELL JOHN R C, RUSSELL EZEQUIEL VIDAL, STANTON WILLIAM A   +2 more
openaire   +2 more sources

Potential of phase-shifted optical proximity correction for 65nm T-shaped pattern in high numerical aperture lithography

Journal of Vacuum Science & Technology B, 2008
exaly  

Optical proximity correction method and system

1999
SAMUELS DONALD JAMES, WORDEMAN MATTHEW R
openaire   +1 more source

Optical proximity correction using regression

2012
GU ALLAN, ZAKHOR AVIDEH, GAO PEIRAN
openaire   +1 more source

Integrated Re-Fragmentation and Curve Correction for Curvilinear Optical Proximity Correction

2026 31st Asia and South Pacific Design Automation Conference (ASP-DAC)
Seohyun Kim, Shilong Zhang, Junha Jang, Youngsoo Shin   +3 more
openaire   +1 more source

METHOD OF VERIFYING ERROR OF OPTICAL PROXIMITY CORRECTION MODEL

2022
OH HEUNGSUK, KANG MINCHEOL, PARK SANGWOOK   +2 more
openaire   +2 more sources

Application of a new approach to optical proximity correction

1999
Patrick Schiavone, Wilhelm Maurer, Andrew C Hourd   +2 more
exaly