Results 211 to 220 of about 19,199 (250)

Optical Proximity Correction (OPC)

2009
openaire   +1 more source

Compensating non-optical effects using electrically driven optical proximity correction

Proceedings of SPIE, 2009
Michael Orshansky, Shayak Banerjee, Lars W Liebmann   +2 more
exaly  

Optical proximity correction with the conditional Wasserstein GAN

2023
Yayi Wei
exaly  

Multivariable solver for optical proximity correction

2010
WONG WILLIAM S, CHEN BEEN-DER, LU YEN-WEN, LI JIANGWEI, NISHIBE TATSUO   +4 more
openaire   +5 more sources

Optical proximity correction method and system

2018
WAN JINYIN, WANG JINHENG, ZHANG LEI, CHEN JIE   +3 more
openaire   +2 more sources

Novel apodization and pellicle optical models for accurate optical proximity correction modeling at 45 and 32nm

Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2007
Kevin Lucas, Qiaolin Zhang, Jacek K Tymiński   +2 more
exaly  

0.18 μm KrF lithography using optical proximity correction based on empirical behavior modeling

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1998
exaly  

Optical proximity correction with PID control through reinforcement learning

2023
exaly  

Fast optimization of defect compensation and optical proximity correction for extreme ultraviolet lithography mask

Optics Communications, 2019
Sikun Li
exaly  

Statistical optical proximity correction

2013
ZHOU WENZHAN, HSIA LIANG CHOO, ZHOU MEISHENG, ZOU ZHENG   +3 more
openaire   +1 more source