Results 191 to 196 of about 1,326 (196)

Method for depositing dielectric film in trenches by PEALD

2018
openaire   +1 more source

Method for forming aluminum nitride-based film by PEALD

2017
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ALD/PEALD CMOS Compatible Oxide for Resistive RAM

2011
Salaün, A., Beugin, V., Grampeix, H., Licitra, C., Rochat, N., Martinez, E., Gergaud, P., Gonon, P., Vallée, Corentin, Mannequin, C., Gaumer, C., Jeannot, S., Buckley, J., Jousseaume, V., Barnes, J.P., Veillerot, M., Pierre, F., Kieffer, I.   +17 more
openaire   +1 more source

Method of depositing film by PEALD using negative bias

2019
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Optical Properties of Erbium Oxide Thin Films on Si by PEALD

2017
DEMİRTAŞ, MUSTAFA, AY, FERİDUN, SEVİK, CEM, KOSKU PERKGÖZ, NİHAN   +3 more
openaire   +1 more source

Characterization of PEALD Coated Thin Films for SRF Cavity Research

Preece, Lea Sophie, Wenskat, Marc, Deyu, Getnet Kacha, Zierold, Robert, Gonzalez Diaz-Palacio, Isabel, Hillert, Wolfgang   +5 more
openaire   +1 more source