Results 181 to 190 of about 1,326 (196)

PEALD and ALE for Area Selective Deposition

2019
openaire   +1 more source

METHOD OF INTEGRATING PEALD TA-CONTAINING FILMS INTO CU METALLIZATION

2007
ISHIZAKA TADAHIRO, MATSUDA TSUKASA, HARA MASAMICHI, FAGUET JACQUES, MIZUSAWA YASUSHI   +4 more
openaire   +2 more sources

PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) APPARATUS

2020
PATSCHEIDER JÖRG, ROHRMANN HARTMUT, WEICHART JÜRGEN, BRITT FLORIAN   +3 more
openaire   +1 more source

Method for Forming Ti-Containing Film by PEALD using TDMAT or TDEAT

2015
TAKAMURE NOBORU, OKABE TATSUHIRO
openaire   +3 more sources

Reliability Improvement of High Mobility Oxide TFTs Based on Hydrogen-Resistant PEALD Al2O3 Gate Insulators Grown with N2O Plasma

ACS Applied Materials & Interfaces
Jin-Seong Park, Yoonseo Kim, Joon Seok Park   +2 more
exaly  

Structural and electrical properties of ultra-thin high-k ZrO film on nitride passivated Ge(100) prepared by PEALD

Materials Science in Semiconductor Processing, 2016
exaly  

Conformality of Coatings Produced Using High Speed Spatial PEALD

Annual Technical Conference Proceedings, 2018
openaire   +1 more source

PEALD Assisted CVD Growth method for 2D MoS2

2018
DEMİRTAŞ, MUSTAFA, AY, FERİDUN, KOSKU PERKGÖZ, NİHAN, ODACI, Cem   +3 more
openaire   +1 more source

Spatial PEALD on Moisture-Containing Substrates and in High Moisture Backgrounds

Annual Technical Conference Proceedings, 2019
openaire   +1 more source

Influence of low and medium ion energy in PEALD processes

2018
Bonvalot, M., Vallee, C., Belhacen, S., Pesce, V., Chaker, A., Gassilloud, R., Gonon, P., Bsiesy, A.   +7 more
openaire   +1 more source