Results 161 to 170 of about 1,326 (196)

Study of PEALD-AlN as Dielectric Layer in GaN MIS-HEMTs

2023 20th China International Forum on Solid State Lighting & 2023 9th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS), 2023
Xuanming Zhang, Xiang Fu, Yuanlei Zhang, Jiachen Duan, Zhijie Kong, Wen Liu   +5 more
openaire   +1 more source

Remarkable Stability Improvement with a High-Performance PEALD-IZO/IGZO Top-Gate Thin-Film Transistor via Modulating Dual-Channel Effects

Advanced Materials Interfaces, 2022
Jin-Seong Park, Taehyun Hong
exaly  

PEALD titanium nitride with direct microwave plasma

2021
CHEN HANHONG, DAN ARKAPRAVA, AUBUCHON JOSEPH, KIM KYOUNG HA, KRAUS PHILIP A   +4 more
openaire   +2 more sources

Electrical characteristics of β-GaO thin films grown by PEALD

Journal of Alloys and Compounds, 2014
Cagla Ozgit-Akgun, Necmi Bıyıklı, Inci Donmez   +2 more
exaly  

Very Thin TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition (PEALD)

Integrated Ferroelectrics, 2004
Soon Yoon, Byoung-Chul Shin, Il-Soo Kim
exaly  

Band alignment between PEALD-AlNO and AlGaN/GaN determined by angle-resolved X-ray photoelectron spectroscopy

Applied Surface Science, 2017
Qian Wang, Dongliang Zhang
exaly  

Advanced thin gas barriers film incorporating alternating structure of PEALD-based AlO/organic-inorganic nanohybrid layers

Applied Surface Science, 2019
Se Hyun Kim, Xinlin Li, Tae Kyu An
exaly  

Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements

Microelectronic Engineering, 2011
Marcel Junige, Jürgen Gluch, U Merkel
exaly  

PEALD PROCESSES USING RUTHENIUM PRECURSOR

2020
CHEN PHILIP S H, HENDRIX BRYAN C, BAUM THOMAS H, CONDO ERIC   +3 more
openaire   +2 more sources

Impact of ion energies in Ar/H capacitively coupled radio frequency discharges on PEALD processes of titanium films

Surface and Coatings Technology, 2018
Shinya Iwashita, Kazuki Denpoh, Tsuyoshi Moriya   +2 more
exaly