Results 171 to 180 of about 1,326 (196)

Topographic Area Selective Deposition (TSD): a comparison between PEALD/q-ALE and PEALD/sputtering approaches

2020
Jaffal, Moustapha, Yeghoyan, Taguhi, Pesce, Vincent, Lefevre, Gauthier, Chaker, Ahmad, David, Sylvain, Gassilloud, Rémy, Posseme, Nicolas, Bonvalot, Marceline, Vallée, Christophe   +9 more
openaire   +1 more source

Bottom-up PEALD process

2015
WU LIN-JUNG, LIN SU-HORNG, YANG CHI-MING
openaire   +2 more sources

PEALD – Atomlagenabscheidung mit Plasmaunterstützung erschließt neue Anwendungsfelder

2013
Geng, Jürgen, Hähnel, Daniel
openaire   +1 more source

Interaction between DC Plasma and Substrates in Spatial PEALD

Annual Technical Conference Proceedings, 2018
openaire   +1 more source

Enhancing cover glass fracture resistance for hand-held devices with PEALD-based AlO coating

Ceramics International, 2019
Jae B. Kwak, Hoyeon Kim
exaly  

Influence of LaSiO passivation interlayer on band alignment between PEALD-AlO and 4H-SiC determined by X-ray photoelectron spectroscopy

Applied Surface Science, 2018
Duo Cao, Yuehui Yu
exaly  

Band alignment regulation of HfO/SiC heterojunctions induced by PEALD with NH-plasma passivation

Physics Letters, Section A: General, Atomic and Solid State Physics, 2019
Wenbo Xin, Peiyi Ye
exaly  

Method of forming insulation film by modified PEALD

2019
KOBAYASHI AKIKO, SHIMIZU AKIRA, KOBAYASHI NOBUYOSHI, LEE WOO-JIN   +3 more
openaire   +1 more source

Evaluation of plasma parameters on PEALD deposited TACN

2012
Piallat, F., Beugin, V., Gassilloud, R., Michallon, P., Dussault, L., Pelissier, B., Asikainen, T., Maes, J.W., Morin, Pascal, Vallée, Corentin   +9 more
openaire   +1 more source

Method for depositing oxide film by thermal ALD and PEALD

2020
FUKAZAWA ATSUKI, FUKUDA HIDEAKI
openaire   +1 more source