Results 241 to 250 of about 22,802 (264)

Formation of Nanoscale Structures of Silicon Photonics and Optoelectronics by Plasma Chemical Etching

2023 Radiation and Scattering of Electromagnetic Waves (RSEMW), 2023
Victor S. Klimin, Julia V. Morozova, Diana V. Markitan, Ilaria O. Kessler   +3 more
openaire   +1 more source

Plasma-induced chemical etching generating Ni3S2 for formaldehyde detection

Chinese Chemical Letters, 2022
Xiaoli Xiong
exaly  

Investigation of the Effect of Atomic Composition on the Plasma-Chemical Etching Rate of Silicon Nitride in High-Power Transistors Based on an AlGaN/GaN Heterojunction

Semiconductors, 2020
V I Egorkin
exaly  

Producing Silicon Carbide Micro and Nanostructures by Plasma‐Free Metal‐Assisted Chemical Etching

Advanced Functional Materials, 2021
Julian A Michaels, Xihang Wu, Clarence Chan   +2 more
exaly  

Effects of ion bombardment and chemical reaction on wafer temperature during plasma etching

Journal of Applied Physics, 1990
O Joubert, Joubert O, Pelletier J
exaly  

Role of N2 addition on CF4/O2 remote plasma chemical dry etching of polycrystalline silicon

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1997
B E E Kastenmeier, G S Oehrlein, Oehrlein G S   +2 more
exaly  

Fabrication of Structures on SiC Surfaces by Plasma Chemical Etching

Russian Microelectronics
V. S. Klimin, P. A. Tarasov, M. N. Grigoryev, P. E. Gavrish, A. A. Tkacheva, V. V. Ptashnik, O. A. Ageev   +6 more
openaire   +1 more source

Chemical gases sensing properties of diamond nanocone arrays formed by plasma etching

Journal of Applied Physics, 2007
C Z Gu, Fu S Y, Li J J
exaly  

Ultrahigh-rate plasma jet chemical etching of silicon

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2001
Schindler A
exaly  

Analysis of the chemical composition and deposition mechanism of the SiO[sub x]–Cl[sub y] layer on the plasma chamber walls during silicon gate etching

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2004
Nader Sadeghi, Gilles Cunge, Sadeghi Nader   +2 more
exaly