Results 251 to 260 of about 22,849 (261)

Fabrication of Structures on SiC Surfaces by Plasma Chemical Etching

Russian Microelectronics
V. S. Klimin, P. A. Tarasov, M. N. Grigoryev, P. E. Gavrish, A. A. Tkacheva, V. V. Ptashnik, O. A. Ageev   +6 more
openaire   +1 more source

Plasma-induced chemical etching generating Ni3S2 for formaldehyde detection

Chinese Chemical Letters, 2022
Xiaoli Xiong
exaly  

Effects of ion bombardment and chemical reaction on wafer temperature during plasma etching

Journal of Applied Physics, 1990
Pelletier J, Joubert O
exaly  

Investigation of the Effect of Atomic Composition on the Plasma-Chemical Etching Rate of Silicon Nitride in High-Power Transistors Based on an AlGaN/GaN Heterojunction

Semiconductors, 2020
V E Zemlyakov
exaly  

Role of N2 addition on CF4/O2 remote plasma chemical dry etching of polycrystalline silicon

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1997
Gottlieb Oehrlein, Oehrlein G S
exaly  

In-Line Plasma-Chemical Etching of Crystalline Silicon Solar Wafers at Atmospheric Pressure

IEEE Transactions on Plasma Science, 2009
Stefan Kaskel, Matthias Leistner, Eckhard Beyer   +2 more
exaly  

Ultrahigh-rate plasma jet chemical etching of silicon

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2001
Schindler A
exaly  

Development of Process for Fast Plasma-Chemical Through Etching of Single-Crystal Quartz in SF6/O2 Gas Mixture

Russian Journal of Applied Chemistry, 2018
Artem Osipov, Aleksandrov S E, S E Aleksandrov   +2 more
exaly  

Simulations of Si and SiO2 etching in SF6+O2 plasma

Vacuum, 2009
Rimantas Knizikevičius
exaly  

Plasma chemical etching of silicon: Basic technology production of tri-gate and FinFET of transistors

2016
exaly