The Role of Surface Topography in Bacterial Adhesion to Amorphous TiO<sub>2</sub>-Coated PMMA. [PDF]
Zeneral Žuža I +10 more
europepmc +1 more source
Integration and electrical evaluation of WS<sub>2</sub> and MoS<sub>2</sub> fets in a 300 mm pilot line. [PDF]
Schram T +15 more
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High-density three-dimensional integration of dynamic random-access memory using vertical dual-gate IGZO TFTs. [PDF]
Liao F +27 more
europepmc +1 more source
Capped Vapor-Liquid-Solid Growth of Vanadium-Substituted Molybdenum Disulfide Ultrathin Films for Enhanced Photocatalytic Activity. [PDF]
Huang PP +18 more
europepmc +1 more source
Atomic armor for thermal stability in nanoporous structures. [PDF]
Yang R +8 more
europepmc +1 more source
Growth of Zn-N Co-Doped Ga<sub>2</sub>O<sub>3</sub> Films by a New Scheme with Enhanced Optical Properties. [PDF]
Liao D +9 more
europepmc +1 more source
Model for Predicting Film Thickness Depending on the Values of the Atomic Layer Deposition Process Parameters. [PDF]
Polomskikh V +3 more
europepmc +1 more source
Room-temperature plasma-enhanced atomic layer deposition (PEALD) of ZnO was studied by depositing the films using diethylzinc and O2 plasma from inductively-coupled plasma (ICP) and capacitively-coupled plasma (CCP) plasma source configurations.
Manu Lahtinen +2 more
exaly +2 more sources
Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition [PDF]
Beryllium oxide (BeO) thin films were grown on a p-type Si substrate by plasma enhanced atomic layer deposition (PEALD) using diethylberyllium as a precursor and O2 plasma. The PEALD BeO exhibited self-saturation and linear growth rates.
Seung Min Lee +2 more
exaly +2 more sources
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