Results 151 to 160 of about 5,793,946 (166)

Remote plasma enhanced atomic layer deposition of titanium nitride film using metal organic precursor (CHNTi) and N plasma

Applied Surface Science, 2021
Hyunwoo Park, Namgue Lee, Byunguk / Kim
exaly  

Very Thin TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition (PEALD)

Integrated Ferroelectrics, 2004
Soon Yoon, Byoung-Chul Shin, Il-Soo Kim
exaly  

Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2020
Ali Mahmoodinezhad, Karsten Henkel, Paul Plate   +2 more
exaly  

Novel Cyclosilazane-Type Silicon Precursor and Two-Step Plasma for Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride

ACS Applied Materials & Interfaces, 2018
Won-Jun Lee, Jae-Min Park
exaly  

Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor

ACS Applied Materials & Interfaces, 2016
Won-Jun Lee, Jae-Min Park
exaly  

Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating

Surface and Coatings Technology, 2014
Jae-Hyung Park, Dong-Suk Han
exaly  

Thermal and plasma enhanced atomic layer deposition of SiO using commercial silicon precursors

Thin Solid Films, 2014
Simo-Pekka Hannula, Oili M.E. Ylivaara, Riikka L. Puurunen   +2 more
exaly  

Low-Temperature One-Step Growth of AlON Thin Films with Homogenous Nitrogen-Doping Profile by Plasma-Enhanced Atomic Layer Deposition

ACS Applied Materials & Interfaces, 2017
xinming Ji, Hong-Liang Lu
exaly  

Al2O3/TiO2 Nanolaminate Thin Film Encapsulation for Organic Thin Film Transistors via Plasma-Enhanced Atomic Layer Deposition

ACS Applied Materials & Interfaces, 2014
Se Hyun Kim, Dae Chung, Kyunghun Kim
exaly  

Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films

Applied Physics Letters, 2012
Mikko Ritala, Joshua D Caldwell, Jaakko Niinistö   +2 more
exaly