Results 161 to 166 of about 5,793,946 (166)

NANOMIXED TiO2-Ga2O3 THIN FILMS GROWN BY PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) METHOD

Integrated Ferroelectrics, 2006
Fukai Shan, B C Shin, G X Liu
exaly  

Plasma-enhanced atomic layer deposition of BaTiO

Scripta Materialia, 2016
Peter Schindler, Jihwan An, Dickson Thian   +2 more
exaly  

Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice

Nanomaterials, 2019
Jian-Guo Yang, Tien-Chien Jen, Jijun Feng   +2 more
exaly  

Plasma-enhanced atomic layer deposition of SnO thin films using SnCl and O plasma

Materials Letters, 2016
Ji-Hoon Ahn, Han-Bo-Ram Lee, Zhixin Wan
exaly  

Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2019
Christophe Vallée, Remy Gassilloud, Bernard Pelissier   +2 more
exaly  

4-3: Silicon-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition for High Mobility Oxide TFT

Digest of Technical Papers SID International Symposium
exaly