Results 251 to 260 of about 22,855 (262)

Chemical gases sensing properties of diamond nanocone arrays formed by plasma etching

Journal of Applied Physics, 2007
Fu S Y, Gu C Z, Li J J
exaly  

Fabrication of Structures on SiC Surfaces by Plasma Chemical Etching

Russian Microelectronics
V. S. Klimin, P. A. Tarasov, M. N. Grigoryev, P. E. Gavrish, A. A. Tkacheva, V. V. Ptashnik, O. A. Ageev   +6 more
openaire   +1 more source

Design and development of medium-pressure plasma process for optical substrate finishing: A comparative study with wet chemical etching

Journal of Manufacturing Processes
Manas Das
exaly  

Basis of macroscopic and microscopic surface shaping and smoothing by plasma assisted chemical etching

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1994
exaly  

InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching

2000
Tol, van der, J.J.G.M., Silova, M., Karouta, F., Broeke, R.G., Tan, H.H., Jagadish, C., Smalbrugge, E., Roy, van, B.H.   +7 more
openaire   +1 more source

Plasma chemical etching of silicon in mems - technology

B K Bogomolov
exaly  

Calculating the Nominal Values of the Matching Device Installation of Plasma Chemical Etching

Key Engineering Materials, 2019
exaly  

Plasma chemical etching of silicon: Basic technology production of tri-gate and FinFET of transistors

2016
exaly  

Plasma-Chemical Etching of Colloidal Photonic Crystal Polystyrene Films

2024 6th International Youth Conference on Radio Electronics, Electrical and Power Engineering (REEPE)
Artem R. Ibragimov, Vladislav S. Maltsev, Konstantin R. Min'ko, Cao V. Hoa, Ekaterina V. Panfilova   +4 more
openaire   +1 more source

Plasma chemical etching of silicon (optimization of process)

B K Bogomolov
exaly