Results 251 to 260 of about 24,132 (263)

Structuring of DLC:Ag nanocomposite thin films employing plasma chemical etching and ion sputtering

Nuclear Instruments & Methods in Physics Research B, 2014
Šaru Nas Meškinis, Sigitas Tamulevicius, Tomas Tamulevičius   +2 more
exaly  

Effect of additive gases and injection methods on chemical dry etching of silicon nitride, silicon oxynitride, and silicon oxide layers in F2 remote plasmas Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2007
N ‐E Lee
exaly  

Simulations of Si and SiO etching in SF+O plasma

Vacuum, 2009
Rimantas Knizikevičius
exaly  

Fabrication of Structures on SiC Surfaces by Plasma Chemical Etching

Russian Microelectronics
V. S. Klimin, P. A. Tarasov, M. N. Grigoryev, P. E. Gavrish, A. A. Tkacheva, V. V. Ptashnik, O. A. Ageev   +6 more
openaire   +1 more source

Investigation of the Effect of Atomic Composition on the Plasma-Chemical Etching Rate of Silicon Nitride in High-Power Transistors Based on an AlGaN/GaN Heterojunction

Semiconductors, 2020
exaly  

Combining Methods of Scanning Probe Nanolithography and Plasma Chemical Etching for the Formation of Vertical Optoelectronic Structures

2023
exaly  

Design and development of medium-pressure plasma process for optical substrate finishing: A comparative study with wet chemical etching

Journal of Manufacturing Processes
Manas Das
exaly  

InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching

2000
Tol, van der, J.J.G.M., Silova, M., Karouta, F., Broeke, R.G., Tan, H.H., Jagadish, C., Smalbrugge, E., Roy, van, B.H.   +7 more
openaire   +1 more source

Dynamics of Deposition and Removal of a Fluorocarbon Film in the Cyclic Process of Plasma-Chemical Etching of Silicon

Bulletin of the Russian Academy of Sciences: Physics
O V Morozov
exaly  

Plasma chemical etching of silicon in MEMS-technology

B K Bogomolov
exaly