Results 151 to 160 of about 1,875 (175)
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Mask-Under-Etch Experiments of Si{110} in TMAH
Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411), 2003This work investigates the etching of {110} silicon at 80°C in TMAH at 25wt% and 12wt%. A wagonwheel pattern having 1" spokes is used, and the under-etched surfaces and inclination angles are observed in detail. Under-etched surfaces are often complex, composed of 2 or 3 facets, some smooth and some rough.
A. Pandy, L.M. Landsberger, M. Kahrizi
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Metal purifier for TMAH developer solution
Advances in Patterning Materials and Processes XL, 2023Jinhong Yu, Robb Fang, Yoshiaki Yamada
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Microfabrication : using bulk wet etching with TMAH
2005In November 2002 a Microfabrication Lab was established in the physics department of McGill University to support research in nanoscience and technology. At the same time, I arrived at McGill to begin my graduate study. So I was assigned to do research on microfabrication, especially bulk wet etching of silicon using TetraMethyl Ammonium Hydroxide ...
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Non standard behaviour of TMAH anisotropic wet etching
2022Trabajo presentado en Eurosensors XII: 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and Their Applications, celebrado en Southampton (Reino Unido), del 13 al 16 de septiembre de ...
Duch, M. +3 more
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Oxidative degradation of TMAH solution with UV persulfate activation
Chemical Engineering Journal, 2014Chi-Wei Wang, Chenju Liang
exaly