Silicon carbide (SiC) substrates have been widely adopted in high-performance applications such as power electronics, optoelectronics, and semiconductors.
Xiaoming Sui, David Wei Zhang, Lin Zhang
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Simulation Analysis of the Chemical Mechanical Polishing Process for Monocrystal 4H-Silicon Carbide Based on Molecular Dynamics. [PDF]
Lei Y, Guo W, Feng K, Sun Z.
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Single V2 defect in 4H silicon carbide Schottky diode at low temperature. [PDF]
Steidl T +13 more
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Influence of Homoepitaxial Layer Thickness on Flatness and Chemical Mechanical Planarization Induced Scratches of 4H-Silicon Carbide Epi-Wafers. [PDF]
Hsieh CH +7 more
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Selective Undercut of Undoped Optical Membranes for Spin-Active Color Centers in 4H- Silicon Carbide. [PDF]
Dietz J, Xie A, Day AM, Hu EL.
europepmc +1 more source
Controlled Spalling of 4H Silicon Carbide with Investigated Spin Coherence for Quantum Engineering Integration. [PDF]
Horn CP +7 more
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Compact Nonvolatile Reconfigurable Mode Converter by Sb<sub>2</sub>S<sub>3</sub> Embedded in 4H-Silicon-Carbide-on-Insulator Platform. [PDF]
Zhu D, Chen J, Qiu S, Deng D, Luo J.
europepmc +1 more source
Effect of Structurally Modified Toluene Diisocyanate-Based Polyurethane Pads on Chemical Mechanical Polishing of 4H Silicon Carbide Substrate. [PDF]
Meng Y, Zhang S, Zhang Z.
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Epitaxial and bulk growth of cubic silicon carbide on off-oriented 4H-silicon carbide substrates
The growth of bulk cubic silicon carbide has for a long time seemed to be something for the future. However, in this thesis the initial steps towards bulk cubic silicon carbide have been taken. The achievement of producing bulk cubic silicon carbide will have a great impact in various fields of science and industry such as for example the fields of ...
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Controlled Chemical Synthesis of Color Centers in Nanocrystalline Silicon Carbide. [PDF]
Bezerra SM +4 more
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