Results 91 to 100 of about 6,778 (181)
Modeling and Measurement of Noise in Aluminium Nitride Piezoelectric MEMS
Advanced Electronic Materials, Volume 12, Issue 3, 4 February 2026.This work analyzes electrical noise in piezoelectric AlN MEMS devices using a combined measurement‐modeling approach. The framework separates sample and amplifier noise contributions and demonstrates close agreement between model and experiment at both room and cryogenic temperatures.
Sina Zare Pakzad +8 more
wiley +1 more source
Depth-dependent EBIC microscopy of radial-junction Si micropillar arrays
Applied Microscopy, 2020 Recent advances in fabrication have enabled radial-junction architectures for cost-effective and high-performance optoelectronic devices. Unlike a planar PN junction, a radial-junction geometry maximizes the optical interaction in the three-dimensional ...
Kaden M. Powell, Heayoung P. Yoon
doaj +1 more source
Biomolecular sensing using surface micromachined silicon plates [PDF]
, 2007 Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented.
Carlen, E.T. +5 more
core +2 more sources
Design of FerroElectric MEMS energy harvesting devices [PDF]
, 2016 Waste heat is a widely available but little used source of power. Converting a thermal gradient into electricity is conventionally done using the Seebeck effect, but devices that use this effect are naturally inefficient.
Blach, Noah T. +2 more
core +1 more source
Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope
Micromachines, 2019 This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method.
Huiliang Cao +10 more
doaj +1 more source
Critical components in 0.14 THz communication systems
, 2012 In the super-heterodyne terahertz communication system, the proper design of the critical components like mixers and filters are of great importance for enhancing its performance. In this work, some issues on our newly developed system setup design for 0.
Shan, Guangcun +3 more
core +1 more source
Micromachines, 2018 This paper focuses on structural optimization of a Butterfly vibratory gyroscope (BFVG). An oblique suspension beam adopting polygonal cross-section is proposed in order to enhance the sensitivity and robustness.
Fenlan Ou +3 more
doaj +1 more source
Advances in Mechanical Engineering, 2012 This paper presents the design, analysis, fabrication, and characterization of an electrostatically driven single-axis active probing device for the applications of cellular force sensing and materials characterization.
Li Zhang, Jingyan Dong
doaj +1 more source
Corrugated Silicon Platelet Feed Horn Array for CMB Polarimetry at 150 GHz
, 2010 Next generation cosmic microwave background (CMB) polarization anisotropy measurements will feature focal plane arrays with more than 600 millimeter-wave detectors.
Beall, James A. +9 more
core +1 more source
Enhanced Vertical Sidewall Quality for Functional AlN Films in 3D Piezo MEMS Applications
Advanced Electronic MaterialsIntegrating piezoelectric materials onto the vertical surfaces of microelectromechanical systems (MEMS) microstructures enables three‐dimensional piezoelectric (3D piezoMEMS) devices, providing multi‐axis sensing and actuation capabilities with a reduced
Arsam Ali +2 more
doaj +1 more source