Results 81 to 90 of about 2,694 (179)

Sub-Millimeter-Wave 10 dB Directional Coupler Based on Micromachining Technique

International Journal of Antennas and Propagation, 2015
A waveguide 10 dB directional coupler operating from 325 GHz to 400 GHz is designed based on the short-slot Riblet-type coupling configuration and fabricated using the deep reactive ion etching (DRIE) silicon micromachining technique.
Shuang Liu, Jiang Hu, Yong Zhang, Yupeng Liu, Tianhao Ren, Ruimin Xu, Quan Xue   +6 more
doaj   +1 more source

Subtle Variations in Surface Properties of Black Silicon Surfaces Influence the Degree of Bactericidal Efficiency

Nano-Micro Letters, 2018
One of the major challenges faced by the biomedical industry is the development of robust synthetic surfaces that can resist bacterial colonization. Much inspiration has been drawn recently from naturally occurring mechano-bactericidal surfaces such as ...
Chris M. Bhadra, Marco Werner, Vladimir A. Baulin, Vi Khanh Truong, Mohammad Al Kobaisi, Song Ha Nguyen, Armandas Balcytis, Saulius Juodkazis, James Y. Wang, David E. Mainwaring, Russell J. Crawford, Elena P. Ivanova   +11 more
doaj   +1 more source

Fabrication of superhydrophobic wide-band 'black silicon' by deep reactive ion etching

, 2011
This paper presents a fabrication technology of 'Black Silicon' with superhydrophobicity and wide-band properties based on an improved deep reactive ion etching (DRIE).
Zhang, Hai-Xia, Xiao-Sheng Zhang, Hai-Xia Zhang, Guang-Yi Sun, Gao, Tian-Le, Zhang, Xiao-Sheng, Tian-Le Gao, Sun, Guang-Yi   +7 more
core   +1 more source

Reactive ion etching of 4H-SiC using SF6/O2 for MEMS application [PDF]

, 2013
Deep Reactive Ion Etching (DRIE) of 4H-SiC performed using SF6/O2 plasma. The etching rates investigated as a function of the ratio of the O2 flow rate to total gas flow rate under different etching conditions such as the effect of power density ...
Hamidon, Mohd Nizar, Hezarjaribi, Yadollah   +1 more
core  

Single-step deep reactive ion etching of ultra-deep Silicon cavities with smooth sidewalls

, 2014
International audiencetA process based on deep reactive ion etching (DRIE) has been developed and optimized for the fabricationof millimeter deep silicon cavities with smooth sidewalls.
Passilly, Nicolas, Chutani, Ravinder Kumar, Hasegawa, Madoka, Gorecki, Christophe, Maurice, Vincent   +4 more
core   +1 more source

Depth-dependent EBIC microscopy of radial-junction Si micropillar arrays

Applied Microscopy, 2020
Recent advances in fabrication have enabled radial-junction architectures for cost-effective and high-performance optoelectronic devices. Unlike a planar PN junction, a radial-junction geometry maximizes the optical interaction in the three-dimensional ...
Kaden M. Powell, Heayoung P. Yoon
doaj   +1 more source

Deep Reactive Ion Etching for High Aspect Ratio Microelectromechanical Components

, 2003
A deep reactive ion etch (DRIE) process for fabrication of high aspect ratio trenches has been developed. Trenches with aspect ratios exceeding 20 and vertical sidewalls with low roughness have been demonstrated. The process has successfully been used in
Jensen, Søren, Hansen, Ole, Rasmussen, Frank Engel, Jacobsen, S., Rasmussen, T., Yalcinkaya, Arda Deniz   +5 more
core   +1 more source

Fabrication of Nanochannels with High Aspect Ratios on a Silicon Substrate by Local Focused Ion Beam Implantation and Deep Reactive Ion Etching

, 2010
Recently, demands for nanochannels have been increasing in biological and nanofluidic applications. In this paper, a fabrication process that produces a nanochannel with a width of less than 20 nm and a high aspect ratio is proposed.
Jin Han, Tae-Gon Kim, Byung-Kwon Min, Sang Jo Lee   +3 more
core   +1 more source

Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope

Micromachines, 2019
This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method.
Huiliang Cao, Yu Liu, Zhiwei Kou, Yingjie Zhang, Xingling Shao, Jinyang Gao, Kun Huang, Yunbo Shi, Jun Tang, Chong Shen, Jun Liu   +10 more
doaj   +1 more source

Analysis and Design of a Polygonal Oblique Beam for the Butterfly Vibratory Gyroscope with Improved Robustness to Fabrication Imperfections

Micromachines, 2018
This paper focuses on structural optimization of a Butterfly vibratory gyroscope (BFVG). An oblique suspension beam adopting polygonal cross-section is proposed in order to enhance the sensitivity and robustness.
Fenlan Ou, Zhanqiang Hou, Xuezhong Wu, Dingbang Xiao   +3 more
doaj   +1 more source