Results 81 to 90 of about 1,971 (139)

A High-Sensitivity MEMS Piezoresistive Pressure Sensor for Intracranial Pressure Monitoring. [PDF]

Micromachines (Basel)
Yang Z, Tang Y, Tang F, Xie B, Ran X, Xie H.   +5 more
europepmc   +1 more source

SOI-Structured Piezoresistive Pressure Sensor with Integration of Temperature Sensor for Downhole Applications. [PDF]

Sensors (Basel)
Mireles J, Jiménez A, Sauceda Á.
europepmc   +1 more source

Compact, scan-pattern-switchable 2D piezoelectric MEMS mirror with 1D addressable scanning. [PDF]

J Microelectromech Syst
Yu J, Zhu Y, Birla M, Lee M, Yang Y, Filipov E, Wang TD, Oldham KR.   +7 more
europepmc   +1 more source

Design and Implementation of Miniaturized Low-Frequency Flexibility-Enhanced Rotating Cantilever Beam Piezoelectric MEMS Microphone. [PDF]

Micromachines (Basel)
Wu B, Chen G, Zhong C, Wang T.
europepmc   +1 more source

Design and Fabrication of High-Frequency Resonant Micro-Accelerometer Based on Piezoelectric Stiffening Effect. [PDF]

Micromachines (Basel)
Todi A, Mansoorzare H, Abdolvand R.
europepmc   +1 more source

Advanced BCl₃-Driven Deep Ion Etching of β-Ga₂O₃ for Precision High-Aspect-Ratio Nanostructures. [PDF]

Sensors (Basel)
Alhalaili B.
europepmc   +1 more source

Linearity Improvement of MEMS Electrochemical Vibration Sensors Based on Tapered-Hole Technology. [PDF]

Micromachines (Basel)
Jiang H, Zhang H, Zhao W, Lu Y, Chen D, Wang J.   +5 more
europepmc   +1 more source

Post-Release Metallization in MEMS Silicon-to-Silicon Contact Switches for On-Resistance Improvement. [PDF]

Micromachines (Basel)
Shuaibu AH, Rabih AAS, Blaquière Y, Nabki F.   +3 more
europepmc   +1 more source

A capacitive-piezoelectric hybrid MEMS microphone with signal fusion for enhancing signal-to-noise ratio. [PDF]

Microsyst Nanoeng
Guan Y, Schneider M, Li D, Zhang H, Mi J, Bertrand A, Sadeghpour S, Wang C, Liu H, Glorieux C, Kraft M.   +10 more
europepmc   +1 more source

A review of glass thermal reflow: method, device, and applications. [PDF]

Microsyst Nanoeng
Zhu M, Shi P, Zhang G, Yan C, Chen F, Liu S, Lian R, Zhu K, Dai H, Wu H, Liu Y, Li B, Du X, Xue G.   +13 more
europepmc   +1 more source