Results 101 to 110 of about 6,778 (181)

Advanced Liquid-Free, Piezoresistive, SOI-Based Pressure Sensors for Measurements in Harsh Environments

Sensors, 2015
In this paper we present and discuss two innovative liquid-free SOI sensors for pressure measurements in harsh environments. The sensors are capable of measuring pressures at high temperatures.
Ha-Duong Ngo, Biswaijit Mukhopadhyay, Oswin Ehrmann, Klaus-Dieter Lang   +3 more
doaj   +1 more source

Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators

Micromachines, 2019
This paper presents resonant pressure micro sensors based on dual double ended tuning fork (DETF) resonators, which are electrostatically excited and piezoresistively detected.
Yulan Lu, Sen Zhang, Pengcheng Yan, Yadong Li, Jie Yu, Deyong Chen, Junbo Wang, Bo Xie, Jian Chen   +8 more
doaj   +1 more source

Development of New 3D Pixel Sensors for Phase 2 Upgrades at LHC

, 2016
We report on the development of new 3D pixel sensors for the Phase 2 Upgrades at the High-Luminosity LHC (HL-LHC). To cope with the requirements of increased pixel granularity (e.g., 50x50 or 25x100 um2 pixel size) and extreme radiation hardness (up to a
Betta, Gian-Franco Dalla, Boscardin, Maurizio, Mendicino, Roberto, Ronchin, Sabina, Sultan, DMS, Zorzi, Nicola   +5 more
core   +1 more source

Dry etching of single crystal PMN-PT piezoelectric material.

, 2011
International audienceDuring the last decade, the applications of PMN-PT spread significantly. Unlike PZT, the appropriate microtechnologies for PMN-PT Piezo-MEMS aren't fully documented in the literature.
Agnus, Joël, Alexandru Ivan, Ioan, Queste, Samuel   +2 more
core   +2 more sources

Vibration interference analysis and verification of micro-fluidic inertial switch

AIP Advances, 2014
The micro-fluidic inertial switch based on liquid metal utilizes the moving mercury droplet to close the switch under the action of acceleration, which is characterized by no moving parts, small contact resistance, long service life and large current. In
Liu Tingting, Su Wei, Yang Tao, Xu Yuan
doaj   +1 more source

Fabrication and Characterization of Silicon Micro-Funnels and Tapered Micro-Channels for Stochastic Sensing Applications

Sensors, 2008
We present a simplified, highly reproducible process to fabricate arrays of tapered silicon micro-funnels and micro-channels using a single lithographic step with a silicon oxide (SiO2) hard mask on at a wafer scale.
Frances S. Ligler, Marie J. Archer
doaj  

Side-wall metallization process for enhanced electrical contact in SOI-based MEMS switches

Micro and Nano Engineering
MEMS inertial switches provide a zero-power alternative to conventional accelerometers by mechanically closing an electrical contact only when a specific acceleration threshold is exceeded.
Inês S. Garcia, Filipa C. Mota, Jorge M. Pereira, Fahimullah Khan, Carlos Ferreira, Jorge Cabral, José Fernandes, Carlos Calaza, Rosana A. Dias, Filipe S. Alves   +9 more
doaj   +1 more source

Ultra Deep Anisotropic Silicon Trenches Using Deep Reactive Ion Etching (DRIE)

2000 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 2000
A.A. Ayón, X. Zhang, R. Khanna
openaire   +1 more source

PATTERN DENSITY BASED PREDICTION FOR DEEP REACTIVE ION ETCH (DRIE)

2004 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 2004
T.F. Hill, H. Sun, H. Taylor, M. Schmidt, D. Boning   +4 more
openaire   +1 more source

Precision Fabrication of High-Speed Micro-Rotors using Deep Reactive Ion Etching (DRIE)

2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 2002
N. Miki, C.J. Teo, L. Ho, X. Zhang
openaire   +1 more source