Results 111 to 120 of about 6,778 (181)

MEMS Mass Spectrometers: the Next Wave of Miniaturization [PDF]

, 2015
Syms, R, Wright, S
core   +1 more source

Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon x-ray lenses [PDF]

, 2015
Hansen, Ole, Hübner, Jörg, Jakobsen, Anders Clemen, Jensen, Flemming, Michael-Lindhard, Jonas, Poulsen, Henning Friis, Simons, Hugh, Stöhr, Frederik   +7 more
core   +1 more source

Linearity Improvement of MEMS Electrochemical Vibration Sensors Based on Tapered-Hole Technology. [PDF]

Micromachines (Basel)
Jiang H, Zhang H, Zhao W, Lu Y, Chen D, Wang J.   +5 more
europepmc   +1 more source

Post-Release Metallization in MEMS Silicon-to-Silicon Contact Switches for On-Resistance Improvement. [PDF]

Micromachines (Basel)
Shuaibu AH, Rabih AAS, Blaquière Y, Nabki F.   +3 more
europepmc   +1 more source

Advanced BCl₃-Driven Deep Ion Etching of β-Ga₂O₃ for Precision High-Aspect-Ratio Nanostructures. [PDF]

Sensors (Basel)
Alhalaili B.
europepmc   +1 more source

A review of commercial and laboratory-based microfluidic devices based on glass and/or silicon substrates. [PDF]

RSC Adv
Deb A, Nagesh G, Harrison T, Spicer D, Ting DS, Ahamed MJ.   +5 more
europepmc   +1 more source

Electrochemical vibration sensor for low frequency detection: model, design and manufacture. [PDF]

Microsyst Nanoeng
Zhao W, Gou G, Zhang H, Jiang H, Hu L, Zhu M, Liu Q, He X, Lu Y, Chen D, Wang J.   +10 more
europepmc   +1 more source

High-Efficiency Fiber Edge Coupling for Silicon Nitride Integrated Photonics. [PDF]

Micromachines (Basel)
Avdeev SS, Baburin AS, Sergeev EV, Kramarenko AB, Belyaev AV, Kushnev DV, Buzaverov KA, Stepanov IA, Echeistov VV, Loginov AS, Bukatin SV, Amiraslanov AS, Lotkov ES, Baklykov DA, Rodionov IA.   +14 more
europepmc   +1 more source

Electrolytic Bubble Coalescence on Hydrophobic Cavity Arrays Determines Departure Radius and Lowers Electrolyte Supersaturation. [PDF]

Small
Raman A, Schlautmann S, Gardeniers H, Fernández Rivas D.   +3 more
europepmc   +1 more source

Subcutaneous and continuous blood pressure monitoring in an ambulatory sheep by piezoelectric micromachined ultrasonic transducers. [PDF]

Microsyst Nanoeng
Peng Y, Xia F, Shao Z, Pala S, Yue W, Ding H, Xie J, Lin L.   +7 more
europepmc   +1 more source