Results 141 to 150 of about 6,778 (181)

Method for In Situ On-Wafer Tensile Test of Thin Films. [PDF]

Micromachines (Basel)
Wang X, Li J, Chen Y, Zhou J, Cheng L, Zhang D.   +5 more
europepmc   +1 more source

A Wafer-Level Fabricated Heating-Vacuum Micro-Platform with Resonant MEMS Monolithically Integrated. [PDF]

Micromachines (Basel)
He K, Feng R, Zheng Y, Guo L, Liao Q, Song D, Xiang Y, Li X.   +7 more
europepmc   +1 more source

Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity. [PDF]

Micromachines (Basel)
Kota SV, Thilsted A, Trimarco D, Pan JY, Hansen O, Hübner J, Taboryski R, Jansen H.   +7 more
europepmc   +1 more source

High-performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves. [PDF]

Microsyst Nanoeng
Zhang H, Lu Y, Hu L, Liu Q, Zhao W, Jiang H, Zhu M, Sun Z, Gou G, Chen D, Wang J.   +10 more
europepmc   +1 more source

A polymer-based MEMS loudspeaker featuring a partially stiffened membrane actuated by a PZT thin film. [PDF]

Commun Eng
Liechti R, Dieppedale C, Rotrou T, Le Rhun G.   +3 more
europepmc   +1 more source

Quantifying grating defects in X-ray Talbot-Lau interferometry through a comparative study of two fabrication techniques. [PDF]

Sci Rep
Pereira A, Spindler S, Shi Z, Romano L, Rawlik M, Marone F, Josell D, Stauber M, Stampanoni M.   +8 more
europepmc   +1 more source

Au-Si Diffusion Effects on Surface Plasmon Resonance Sensor Using Internal Photoemission at Metal/Si Schottky Barrier. [PDF]

ACS Omega
Ukaji M, Abubakr E, Imai Y, Kan T.
europepmc   +1 more source

UV-assisted nanoimprint lithography: the impact of the loading effect in silicon on nanoscale patterns of metalens. [PDF]

Nanoscale Adv
Alnakhli Z, Liu Z, AlQatari F, Cao H, Li X.   +4 more
europepmc   +1 more source