Results 31 to 40 of about 6,778 (181)
Key Processes of Silicon-On-Glass MEMS Fabrication Technology for Gyroscope Application
Sensors, 2018 MEMS fabrication that is based on the silicon-on-glass (SOG) process requires many steps, including patterning, anodic bonding, deep reactive ion etching (DRIE), and chemical mechanical polishing (CMP).
Zhibo Ma +4 more
doaj +1 more source
A novel deep reactive ion etched (DRIE) glass micro-model for two-phase flow experiments
Lab on a Chip, 2012 In the last few decades, micro-models have become popular experimental tools for two-phase flow studies. In this work, the design and fabrication of an innovative, elongated, glass-etched micro-model with dimensions of 5 × 35 mm(2) and constant depth of 43 microns is described.
Karadimitriou, N.K. +4 more
openaire +4 more sources
AIP Advances, 2016 In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiNx membranes using Deep Reactive Ion Etching (DRIE).
E. Serra +18 more
doaj +1 more source
Служение здоровью людей - цель жизни [PDF]
, 2003 Cross-flow pressure regulating valve structures are attractive for high-flow pressure control applications due to the decreased actuation force required and the reduced device footprint area.
Василенко, Н. И. +2 more
core +1 more source
A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
Sensors, 2011 This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive
Mohd Haris Md Khir, Hongwei Qu, Peng Qu
doaj +1 more source
Design, Fabrication, Testing and Simulation of a Rotary Double Comb Drives Actuated Microgripper
Micromachines, 2021 This paper presents the development of a new microgripper actuated by means of rotary-comb drives equipped with two cooperating fingers arrays. The microsystem presents eight CSFH flexures (Conjugate Surface Flexure Hinge) that allow the designer to ...
Nicola Pio Belfiore +8 more
doaj +1 more source
Proceedings, 2017 This paper presents an array of five aluminum nitride (AlN) based piezoelectric micromachined ultrasound transducers (pMUTs) with different dimensions operating at 540–2360 kHz in air.
Sina Sadeghpour +3 more
doaj +1 more source
Single-mask thermal displacement sensor in MEMS [PDF]
, 2010 In this work we describe a one degree-of-freedom microelectromechanical thermal\ud displacement sensor integrated with an actuated stage. The system was fabricated in the device layer of a silicon-on-insulator wafer using a single-mask process.
Abelmann, L. +5 more
core +7 more sources
Fabrication of comb-drive actuators for straining nanostructured suspended graphene
, 2018 We report on the fabrication and characterization of an optimized comb-drive actuator design for strain-dependent transport measurements on suspended graphene.
Buca, D. +6 more
core +1 more source
Frontiers in Bioengineering and Biotechnology, 2022 We report a scalable and cost-effective fabrication approach for constructing bio-inspired micro/nanostructured surfaces. It involves silicon microstructure etching using a deep reactive ion etch (DRIE) method, nanowires deposition via glancing angle ...
Lansheng Zhang +5 more
doaj +1 more source