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Controlling an epitaxial growth process in an epitaxial reactor
2015SCHIEKOFER MANFRED +2 more
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Epitaxial growth method and substrate for epitaxial growth
2008NAKAMURA MASASHI, KURITA HIDEKI
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Selective epitaxy using epitaxy-prevention layers
2016CHENG CHENG-WEI +3 more
openaire +3 more sources