Results 121 to 130 of about 95,287 (195)

Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry. [PDF]

Sci Rep, 2020
Kilic U, Mock A, Sekora D, Gilbert S, Valloppilly S, Melendez G, Ianno N, Langell M, Schubert E, Schubert M.   +9 more
europepmc   +1 more source

Effect of Precursor Purge Time on Plasma-Enhanced Atomic Layer Deposition-Prepared Ferroelectric Hf_0.5Zr_0.5O₂ Phase and Performance. [PDF]

ACS Omega
Choi YK, Holsgrove K, Watson A, Aronson BL, Lenox MK, Shvilberg L, Zhou C, Fields SS, Wang S, McDonnell SJ, Kumar A, Ihlefeld JF.   +11 more
europepmc   +1 more source

Thermal and plasma enhanced atomic layer deposition on powders and particles [PDF]

, 2016
Cremers, Véronique, Deduytsche, Davy, Detavernier, Christophe, Haemers, Johan, Longrie, Delphine, Rampelberg, Geert   +5 more
core   +1 more source

TiO2/HfO2 bi-layer gate stacks grown by atomic layer deposition for germanium-based metal-oxide-semiconductor devices using GeOxNy passivation layer [PDF]

, 2011
Caymax, Matty, Delabie, Annelies, Detavernier, Christophe, Jiang, Yu-Long, Lin, Dennis, Musschoot, Jan, Qu, Xin-Ping, Schaekers, Marc, Van den Berghe, Sven, Xie, Qi   +9 more
core   +1 more source

Biocompatible Co-organic Composite Thin Film Deposited by VHF Plasma-Enhanced Atomic Layer Deposition at a Low Temperature. [PDF]

ACS Omega
Yeom WK, Lee JW, Bae JA, Sung DI, Kim T, Lee JH, Yeom GY.   +6 more
europepmc   +1 more source

Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition. [PDF]

ACS Appl Mater Interfaces, 2019
Kim HJK, Kaplan KE, Schindler P, Xu S, Winterkorn MM, Heinz DB, English TS, Provine J, Prinz FB, Kenny TW.   +9 more
europepmc   +1 more source

Plasma-enhanced atomic layer deposition of thin vanadium nitride layers as a copper diffusion barrier [PDF]

, 2013
Blasco, Nicolas, Deduytsche, Davy, Detavernier, Christophe, Devloo-Casier, Kilian, Rampelberg, Geert, Schaekers, Marc   +5 more
core  

High-κ Dielectric on ReS₂: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al₂O₃. [PDF]

Materials (Basel), 2019
Khosravi A, Addou R, Catalano M, Kim J, Wallace RM.   +4 more
europepmc   +1 more source

On the transformation of "zincone"-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition. [PDF]

Beilstein J Nanotechnol, 2019
Perrotta A, Pilz J, Pachmajer S, Milella A, Coclite AM.   +4 more
europepmc   +1 more source

Edge-Site Nanoengineering of WS₂ by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution. [PDF]

Chem Mater, 2019
Balasubramanyam S, Shirazi M, Bloodgood MA, Wu L, Verheijen MA, Vandalon V, Kessels WMM, Hofmann JP, Bol AA.   +8 more
europepmc   +1 more source