Results 201 to 210 of about 360 (212)

Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS

Materials, 2015
Adriana Szeghalmi, Andreas Tünnermann
exaly  

An N‐Heterocyclic Carbene Based Silver Precursor for Plasma‐Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure

Angewandte Chemie - International Edition, 2018
Detlef Rogalla, Nils Boysen, Thomas Riedl   +2 more
exaly  

Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2019
Zhongwei Liu, Liu Zhongwei
exaly  

Plasma enhanced atomic layer deposition with pulsed plasma exposure

2015
SIMS JAMES S, HENRI JON, KELCHNER KATHRYN M, JANJAM SATHISH BABU S V, TANG SHANE   +4 more
openaire   +1 more source

A PLASMA ENHANCED ATOMIC LAYER DEPOSITION SYSTEM AND METHOD

2007
openaire   +2 more sources

Topographic Selective Deposition (TSD) by Combining Plasma Enhanced Atomic Layer Deposition and Atomic Layer Etching Processes

2021
Jaffal, Moustapha, Lefevre, Gauthier, Yeghoyan, Taguhi, Chevolleau, Thierry, Gassilloud, Rémy, Posseme, Nicolas, Bonvalot, Marceline   +6 more
openaire   +1 more source

Apparatus and process for plasma-enhanced atomic layer deposition

2010
MA PAUL, SHAH KAVITA, WU DIEN-YEH, GANGULI SESHADRI, MARCADAL CHRISTOPHE, WU FREDERICK C, CHU SCHUBERT S   +6 more
openaire   +3 more sources

Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films Using Ultralow Electron Temperature Plasma

ACS Applied Materials & Interfaces
Chin-Wook Chung, Hyeongtag Jeon, Minseok Kim   +2 more
exaly  

High voltage, low pressure plasma enhanced atomic layer deposition

2020
openaire   +2 more sources

HEMTs with an AlxGa1-xN Barrier layer Grown by Plasma Enhanced Atomic Layer Deposition

2018
CHEN MIIN-JANG, LEE WEI-HAO, SHIH HUAN-YU   +2 more
openaire   +2 more sources