Results 191 to 200 of about 360 (212)

Plasma deposition—Impact of ions in plasma enhanced chemical vapor deposition, plasma enhanced atomic layer deposition, and applications to area selective deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2020
Taguhi Yeghoyan, , Christophe Vallée
exaly  

SELECTIVE PLASMA ENHANCED ATOMIC LAYER DEPOSITION

2022
PEARLSTEIN RONALD M, LEI XINJIAN, RIDGEWAY ROBERT GORDON, WU AIPING, LEE YI-CHIA, AGARWAL SUMIT, RAMESH ROHIT NARAYANAN KAVASSERY, XU WANXING, GASVODA RYAN JAMES   +8 more
openaire   +1 more source

Comparative Study of Thermal and Plasma-Enhanced Atomic Layer Deposition of Iron Oxide Using Bis(N,N′-di-butylacetamidinato)iron(II)

Nanomaterials, 2023
Jong-Ryul Jeong, Nari Jeon, Boyun Choi   +2 more
exaly  

Structural, Optical and Electrical Properties of HfO2 Thin Films Deposited at Low-Temperature Using Plasma-Enhanced Atomic Layer Deposition

Materials, 2020
Soon Yoon, Ju-Young Yun, Kyoung-Mun Kim   +2 more
exaly  

High-κ Dielectric on ReS2: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al2O3

Materials, 2019
Robert M Wallace, Massimo Catalano, Ava Khosravi   +2 more
exaly  

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Thin Solid Films, 2014
Simo-Pekka Hannula, Oili M E Ylivaara, Riikka Puurunen   +2 more
exaly  

Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice

Nanomaterials, 2019
Jianguo Yang, Tien-Chien Jen, Jijun Feng   +2 more
exaly  

Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2017
Christophe Vallée, Remy Gassilloud, Vallée Christophe   +2 more
exaly  

Novel Cyclosilazane-Type Silicon Precursor and Two-Step Plasma for Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride

ACS Applied Materials & Interfaces, 2018
Won-Jun Lee, Jae-Min Park
exaly  

PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) APPARATUS

2020
PATSCHEIDER JÖRG, ROHRMANN HARTMUT, WEICHART JÜRGEN, BRITT FLORIAN   +3 more
openaire   +1 more source