Results 271 to 280 of about 96,312 (290)

Plasma enhanced atomic layer deposition of Ga

Journal of Materials Chemistry A, 2014
Ranjith K. Ramachandran, Jolien Dendooven, Jonas Botterman, Sreeprasanth Pulinthanathu Sree, Dirk Poelman, Johan A. Martens, Hilde Poelman, Christophe Detavernier   +7 more
openaire   +1 more source

Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2020
Ali Mahmoodinezhad, Christoph Janowitz, Franziska Naumann   +2 more
exaly  

Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2023
Heli Seppänen, Igor Prozheev, Christoffer Kauppinen   +2 more
exaly  

Plasma-enhanced atomic layer deposition of SiO2 film using capacitively coupled Ar/O2 plasmas: A computational investigation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2021
Chenhui Qu, Mark J Kushner
exaly  

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Thin Solid Films, 2014
Matti Putkonen, Oili M E Ylivaara, Riikka L Puurunen   +2 more
exaly  

Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2018
Saravana Balaji Basuvalingam, Bart Macco, Harm C M Knoops   +2 more
exaly  

Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications

Applied Physics Letters, 2006
Ki-Bum Kim
exaly  

Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2017
Rémy Gassilloud, Christophe Vallée
exaly  

Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2012
Jaakko Niinistö, Marko Juhani Vehkamäki, Marianna Kemell   +2 more
exaly  

An N‐Heterocyclic Carbene Based Silver Precursor for Plasma‐Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure

Angewandte Chemie - International Edition, 2018
Nils Boysen, Tim Hasselmann, Detlef Rogalla   +2 more
exaly