Results 271 to 280 of about 5,793,656 (288)

Structural, Optical and Electrical Properties of HfO2 Thin Films Deposited at Low-Temperature Using Plasma-Enhanced Atomic Layer Deposition

Materials, 2020
Soon Yoon, Ju-Young Yun, Kyoung-Mun Kim   +2 more
exaly  

High-κ Dielectric on ReS2: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al2O3

Materials, 2019
Robert M Wallace, Massimo Catalano, Ava Khosravi   +2 more
exaly  

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Thin Solid Films, 2014
Simo-Pekka Hannula, Oili M E Ylivaara, Riikka Puurunen   +2 more
exaly  

Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2017
Christophe Vallée, Remy Gassilloud
exaly  

Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice

Nanomaterials, 2019
Jianguo Yang, Tien-Chien Jen, Jijun Feng   +2 more
exaly  

PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) APPARATUS

2020
PATSCHEIDER JÖRG, ROHRMANN HARTMUT, WEICHART JÜRGEN, BRITT FLORIAN   +3 more
openaire   +1 more source

Novel Cyclosilazane-Type Silicon Precursor and Two-Step Plasma for Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride

ACS Applied Materials & Interfaces, 2018
Won-Jun Lee, Jae-Min Park
exaly  

An N‐Heterocyclic Carbene Based Silver Precursor for Plasma‐Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure

Angewandte Chemie - International Edition, 2018
Detlef Rogalla, Nils Boysen, Thomas Riedl   +2 more
exaly  

Plasma enhanced atomic layer deposition with pulsed plasma exposure

2015
SIMS JAMES S, HENRI JON, KELCHNER KATHRYN M, JANJAM SATHISH BABU S V, TANG SHANE   +4 more
openaire   +1 more source

Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2019
Zhongwei Liu
exaly