Results 281 to 288 of about 5,793,656 (288)

A PLASMA ENHANCED ATOMIC LAYER DEPOSITION SYSTEM AND METHOD

2007
openaire   +2 more sources

Apparatus and process for plasma-enhanced atomic layer deposition

2010
MA PAUL, SHAH KAVITA, WU DIEN-YEH, GANGULI SESHADRI, MARCADAL CHRISTOPHE, WU FREDERICK C, CHU SCHUBERT S   +6 more
openaire   +3 more sources

Topographic Selective Deposition (TSD) by Combining Plasma Enhanced Atomic Layer Deposition and Atomic Layer Etching Processes

2021
Jaffal, Moustapha, Lefevre, Gauthier, Yeghoyan, Taguhi, Chevolleau, Thierry, Gassilloud, Rémy, Posseme, Nicolas, Bonvalot, Marceline   +6 more
openaire   +1 more source

Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films Using Ultralow Electron Temperature Plasma

ACS Applied Materials & Interfaces
Sung Hoon Kim, Chin-Wook Chung, Hyeongtag Jeon   +2 more
exaly  

Optimization of Plasma-Enhanced Atomic Layer Deposition of Cobalt for Interconnects

2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Sandra Schujman, Natalya Tokranova, Van Long Nguyen, Christophe Vallée, Vidya Kaushik   +4 more
openaire   +1 more source

High voltage, low pressure plasma enhanced atomic layer deposition

2020
openaire   +2 more sources

HEMTs with an AlxGa1-xN Barrier layer Grown by Plasma Enhanced Atomic Layer Deposition

2018
CHEN MIIN-JANG, LEE WEI-HAO, SHIH HUAN-YU   +2 more
openaire   +2 more sources

Plasma enhanced atomic layer deposition of silicon-containing films

2008
THRIDANDAM HAREESH, XIAO MANCHAO, LEI XINJIAN, GAFFNEY THOMAS RICHARD, KARWACKI EUGENE JOSEPH JR   +4 more
openaire   +1 more source