Results 281 to 290 of about 96,312 (290)

Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2005
Jane P Chang
exaly  

Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films

Applied Physics Letters, 2012
Josh D Caldwell, Jaakko Niinistö, Mikko Ritala   +2 more
exaly  

Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

Applied Catalysis B: Environmental, 2009
Jungwon Kim, Wonyong Choi, Hyungjun Kim
exaly  

Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co

Applied Physics Letters, 2007
Han-Bo-Ram Lee, Hyungjun Kim
exaly  

Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2019
Igor Krylov, Yuanshen Qi, Kamira Cohen-Weinfeld   +2 more
exaly  

?Characteristics of HfN Films Deposited by Remote Plasma-enhanced Atomic Layer Deposition

Journal of the Korean Physical Society, 2010
Wooho Jeong, Youngbin Ko, Seokhwan Bang, Seungjun Lee, Hyeongtag Jeon   +4 more
openaire   +1 more source

Effects of O2 plasma treatment on moisture barrier properties of SiO2 grown by plasma-enhanced atomic layer deposition

Ceramics International, 2019
Yujin Lee, Seunggi Seo, Il-Kwon Oh
exaly  

Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2019
exaly  

Topographic Selective Deposition (TSD) by Combining Plasma Enhanced Atomic Layer Deposition and Atomic Layer Etching Processes

2021
Jaffal, Moustapha, Lefevre, Gauthier, Yeghoyan, Taguhi, Chevolleau, Thierry, Gassilloud, Rémy, Posseme, Nicolas, Bonvalot, Marceline   +6 more
openaire   +1 more source

Peculiarities of Doped GaP Layers Growth by Plasma Enhanced Atomic Layer Deposition

2019
Gudovskikh, Alexander S., Baranov, Artem, Morozov, Ivan, Uvarov, A., Kudryashov, Dmitriy A., Kleider, Jean-Paul   +5 more
openaire   +1 more source