Results 141 to 148 of about 103,452 (148)

Silicon anisotropic etching in TMAH solutions containing alcohol and surfactant additives

Sensors and Actuators A: Physical, 2012
Irena Zubel
exaly  

Anisohopic etching with TMAH-IPA

1992
van Hal, R.E.G., Bergveld, Piet
openaire   +1 more source

Effect of additives on the anisotropic etching of silicon by using a TMAH based solution

Electronic Materials Letters, 2015
Jung-Sik Kim, Bum-Joon Kim
exaly  

Anisotropic etching with TMAH-IPA

1993
van Hal, R.E.G., Streekstra, Wim, Bergveld, Piet   +2 more
openaire   +2 more sources

Effective improvement in the etching characteristics of Si{110} in low concentration TMAH solution

Micro and Nano Letters, 2018
Prem Pal, Avvaru Venkata Narasimha Rao
exaly  

Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH

Sensors and Actuators A: Physical, 2009
Prem Pal, M Shikida, M A Gosalvez
exaly  

The characteristic behavior of TMAH water solution for anisotropic etching on both Silicon substrate and SiO layer

Sensors and Actuators A: Physical, 2001
Minking Chyu, Ping-Hei Chen
exaly  

Anisotropic etching and electrochemical etch-stop properties of silicon in TMAH:IPA:pyrazine solutions

Metals and Materials International, 2001
exaly