Results 151 to 160 of about 812 (165)

Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

Sensors and Actuators A: Physical, 1999
Mitsuhiro Shikida
exaly  

Differences in etching characteristics of TMAH and KOH on preparing inverted pyramids for silicon solar cells

Applied Surface Science, 2013
Yupeng Xing
exaly  

Silicon anisotropic etching in TMAH solutions containing alcohol and surfactant additives

Sensors and Actuators A: Physical, 2012
Irena Zubel
exaly  

TMAH-Based Anisotropic Etching

2017
openaire   +1 more source

Smooth etching of silicon using TMAH and isopropyl alcohol for MEMS applications

Microelectronic Engineering, 2005
Kalpathy B Sundaram, Arun Vijayakumar, Ganesh Subramanian   +2 more
exaly  

Effect of additives on the anisotropic etching of silicon by using a TMAH based solution

Electronic Materials Letters, 2015
Jung-Sik Kim, Kim Jung-Sik
exaly  

Effective improvement in the etching characteristics of Si{110} in low concentration TMAH solution

Micro and Nano Letters, 2018
Veerla Swarnalatha, Avvaru Venkata Narasimha Rao, Prem Pal   +2 more
exaly  

Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH

Sensors and Actuators A: Physical, 2009
Prem Pal, MIGUEL A Gosalvez, M Shikida
exaly  

Anisohopic etching with TMAH-IPA

1992
van Hal, R.E.G., Bergveld, Piet
openaire   +1 more source

The characteristic behavior of TMAH water solution for anisotropic etching on both Silicon substrate and SiO2 layer

Sensors and Actuators A: Physical, 2001
Ping-Hei Chen, Minking K Chyu
exaly