Results 161 to 165 of about 812 (165)

Anisotropic etching with TMAH-IPA

1993
van Hal, R.E.G., Streekstra, Wim, Bergveld, Piet   +2 more
openaire   +2 more sources

Normally-off AlGaN/GaN-based MOS-HEMT with self-terminating TMAH wet recess etching

Solid-State Electronics, 2018
Dong-Hyeok Son, Chul-Ho Won, Jun-Hyeok Lee   +2 more
exaly  

Aluminium passivation for TMAH based anisotropic etching for MEMS applications

Electronics Letters, 1999
A M Gundlach, A J Walton
exaly  

An improved TMAH Si-etching solution without attacking exposed aluminum

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), 2002
null Gui-Zhen Yan, P.C.H. Chan, null I-Ming Hsing, R.K. Sharma, J.K.O. Sin   +4 more
openaire   +1 more source

Anisotropic etching and electrochemical etch-stop properties of silicon in TMAH:IPA:pyrazine solutions

Metals and Materials International, 2001
exaly