Results 51 to 60 of about 4,818,117 (298)

Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

Microsystems & Nanoengineering, 2023
A novel technology for the precise fabrication of quartz resonators for MEMS applications is introduced. This approach is based on the laser-induced chemical etching of quartz.
John Linden, Neta Melech, Igor Sakaev, Ofer Fogel, Slava Krylov, David Nuttman, Zeev Zalevsky, Marina Sirota   +7 more
doaj   +1 more source

Wet Chemical Etching of Silicon {111}: Autocatalysis in Pit Formation [PDF]

Journal of The Electrochemical Society, 2008
Accuracy and reproducibility of etching is essential to obtaining the smallest-scale devices in silicon. The present study focuses on the etching of silicon {111}, the slowest etching face, using different aqueous solutions of KOH. In all cases, shallow, point-bottomed etch pits are formed.
Shah, I.A., Wolf, B.M.A. Van der, Enckevort, W.J.P. van, Vlieg, E.   +3 more
openaire   +2 more sources

H3PO4-based wet chemical etching for recovery of dry-etched GaN surfaces

Applied Surface Science, 2022
The impact of several wet etchants commonly encountered in the microelectronic industry on the surface chemistry of GaN on silicon was explored. In order to get closer to fully recessed gate HEMT fabrication processes, we investigated different kinds of GaN surfaces.
Benrabah, Sabria, Legallais, Maxime, Besson, Pascal, Ruel, Simon, Vauche, Laura, Pelissier, Bernard, Thieuleux, Chloé, Salem, Bassem, Charles, Matthew   +8 more
openaire   +3 more sources

Titanium Suboxides Responsible for Electronic Anomaly Near Room Temperature in the Ti3C2Tx MXene

Advanced Functional Materials, EarlyView.
Our multi‐technique study reveals that the near‐room‐temperature anomaly in Ti3C2Tx MXene is linked to titanium suboxide nanodomains, including Ti3O5, embedded within the MXene host. Their temperature‐driven transformation provides an alternative explanation to solvent‐ and swelling‐based models and offers new insight into the thermally activated ...
Bence G. Márkus, Bradlee J. McIntosh, Lili Vajtai, Anna Nyáry, Sándor H. Sipos, Nirmal J. Ghimire, Ferenc Simon, László Forró, Dávid Beke   +8 more
wiley   +1 more source

Measurement of threading dislocation densities in GaN by wet chemical etching [PDF]

, 2006
We demonstrate a technique based on wet chemical etching that enables quick and accurate evaluation of edge- and screw/mixed-type threading dislocations (TDs) in GaN. Large and small etch pits are formed by phosphoric acid on the etched surfaces.
Yang H, Chen, J, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China. E-mail: jchen@red.semi.ac.cn, Chen J, Zhao DG, Ploog KH, Wang JF, Zhu JJ, Wang H, Zhang SM, Jiang DS, Jahn U   +10 more
core  

Study on Electrical and Mechanical Properties of Double-End Supported Elastic Substrate Prepared by Wet Etching Process

Micromachines
Preparing elastic substrates as a carrier for dual-end supported nickel chromium thin film strain sensors is crucial. Wet etching is a vital microfabrication process widely used in producing microelectronic components for various applications.
Ding Song, Wenge Wu
doaj   +1 more source

Simulation of anisotropic wet-chemical etching using a physical model [PDF]

Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), 1999
We present a method to describe the orientation dependence of the etch rate in anisotropic etching solutions of silicon, or any other single crystalline material, by analytical functions. The parameters in these functions have a simple physical meaning.
van Suchtelen, J., Sato, K., van Veenendaal, E., Nijdam, A.J., Gardeniers, Johannes G.E., van Enckevort, W.J.P., Elwenspoek, Michael Curt   +6 more
openaire   +2 more sources

Advances in Sustainable and Wearable Textile Based Soft Robotics

Advanced Functional Materials, EarlyView.
This Review examines advances in wearable textile‐based soft robotics, focusing on sustainable materials, integrated sensing, and scalable actuation. It discusses manufacturing and system integration across healthcare, assistive robotics, prosthetics, and human–machine interfaces, and highlights key challenges in circular design, including life‐cycle ...
Zahir Abbas, Marzia Dulal, Sophia K. Novoselov, Victoria K. Novoselov, Kostya S. Novoselov, Shaila Afroj, Nazmul Karim   +6 more
wiley   +1 more source

Etching-Free Transfer and Nanoimaging of CVD-Grown MoS2 Monolayers [PDF]

, 2021
The transfer of two-dimensional materials from grown substrates onto target substrates is critical for device applications and postgrown analysis. The traditional transfer method for as-grown two-dimensional materials requires a wet chemical etching ...
Braulio Soares Archanjo, Cecília Vilani, Fernando Lazaro Freire, Syed Hamza Safeer, Michael Nazarkovsky, Thiago L. Vasconcelos (6325151), Michael Nazarkovsky (5674727), Braulio Soares Archanjo (10346501), Cecília Vilani (11441197), Fernando Lazaro Freire (10346510), Thiago L. Vasconcelos, Bruno S. Oliveira (8594529), Victor Carozo (10346513), Victor Carozo, Syed Hamza Safeer (10346492), Bruno S. Oliveira   +15 more
core   +1 more source

Recent Progress of Black Silicon: From Fabrications to Applications

Nanomaterials, 2020
Since black silicon was discovered by coincidence, the special material was explored for many amazing material characteristics in optical, surface topography, and so on.
Zheng Fan, Danfeng Cui, Zengxing Zhang, Zhou Zhao, Hongmei Chen, Yanyun Fan, Penglu Li, Zhidong Zhang, Chenyang Xue, Shubin Yan   +9 more
doaj   +1 more source