Results 51 to 60 of about 5,716,928 (282)

Simulation of anisotropic wet-chemical etching using a physical model [PDF]

Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), 1999
We present a method to describe the orientation dependence of the etch rate in anisotropic etching solutions of silicon, or any other single crystalline material, by analytical functions. The parameters in these functions have a simple physical meaning.
van Suchtelen, J., Sato, K., van Veenendaal, E., Nijdam, A.J., Gardeniers, Johannes G.E., van Enckevort, W.J.P., Elwenspoek, Michael Curt   +6 more
openaire   +2 more sources

Self‐Sintering Ionogel Binder for Flexible, Recyclable, and Healable Printed Giant Magnetoresistive Sensors

Advanced Functional Materials, EarlyView.
ABSTRACT Electronic waste has emerged as a major environmental challenge, driven by the massive consumption and a limited lifetime of modern electronic devices, stimulating the development of sustainable electronics. Here, an all‐biomaterial gelatin‐choline‐citric acid ([Ch][CA]) ionogel is developed as an active binder to realize self‐sintered ...
Lin Guo, Xiaotao Wang, Guannan Mu, Proloy Taran Das, Igor Veremchuk, Conrad Schubert, Aaron D. Cross, Yevhen Zabila, Xuan Peng, Larysa Baraban, Denys Makarov   +10 more
wiley   +1 more source

Study on Electrical and Mechanical Properties of Double-End Supported Elastic Substrate Prepared by Wet Etching Process

Micromachines
Preparing elastic substrates as a carrier for dual-end supported nickel chromium thin film strain sensors is crucial. Wet etching is a vital microfabrication process widely used in producing microelectronic components for various applications.
Ding Song, Wenge Wu
doaj   +1 more source

Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

Microsystems & Nanoengineering, 2023
A novel technology for the precise fabrication of quartz resonators for MEMS applications is introduced. This approach is based on the laser-induced chemical etching of quartz.
John Linden, Neta Melech, Igor Sakaev, Ofer Fogel, Slava Krylov, David Nuttman, Zeev Zalevsky, Marina Sirota   +7 more
doaj   +1 more source

Wet Chemical Etching of Silicon {111}: Autocatalysis in Pit Formation [PDF]

Journal of The Electrochemical Society, 2008
Accuracy and reproducibility of etching is essential to obtaining the smallest-scale devices in silicon. The present study focuses on the etching of silicon {111}, the slowest etching face, using different aqueous solutions of KOH. In all cases, shallow, point-bottomed etch pits are formed.
Shah, I.A., Wolf, B.M.A. Van der, Enckevort, W.J.P. van, Vlieg, E.   +3 more
openaire   +2 more sources

Laser smoothing of binary gratings and multilevel etched structures in fused silica [PDF]

, 2010
We describe a promising approach to the processing of micro-optical components, where CO2 laser irradiation in raster scan is used to generate localized surface melting of binary or multilevel structures on silica, fabricated by conventional reactive-ion
Wlodarczyk, Krystian Lukasz, Mendez, Enrique, Hall, Denis R., Baker, Howard J., McBride, Roy   +4 more
core   +1 more source

Fully Additive Vertical Organic Electrochemical Transistors on Renewable and Compostable Substrates Enable Ultrasensitive Bioelectronics

Advanced Functional Materials, EarlyView.
Fully additive vertical organic electrochemical transistors (vOECTs) with channel‐length of 226 nm on a 50 µm compostable substrate achieve >106 current modulation and ∼36 mS transconductance. Ion‐selective integration enables 1.1 mA dec−1 sensitivity and 36 µm detection limit, highlighting a scalable platform for sustainable electronics and ...
Giulia Frusconi, Samuele Lavelli, Zsolt M. Kovács‐Vajna, Fabrizio Torricelli   +3 more
wiley   +1 more source

Recent Progress of Black Silicon: From Fabrications to Applications

Nanomaterials, 2020
Since black silicon was discovered by coincidence, the special material was explored for many amazing material characteristics in optical, surface topography, and so on.
Zheng Fan, Danfeng Cui, Zengxing Zhang, Zhou Zhao, Hongmei Chen, Yanyun Fan, Penglu Li, Zhidong Zhang, Chenyang Xue, Shubin Yan   +9 more
doaj   +1 more source

Advances in Sustainable and Wearable Textile Based Soft Robotics

Advanced Functional Materials, EarlyView.
This Review examines advances in wearable textile‐based soft robotics, focusing on sustainable materials, integrated sensing, and scalable actuation. It discusses manufacturing and system integration across healthcare, assistive robotics, prosthetics, and human–machine interfaces, and highlights key challenges in circular design, including life‐cycle ...
Zahir Abbas, Marzia Dulal, Sophia K. Novoselov, Victoria K. Novoselov, Kostya S. Novoselov, Shaila Afroj, Nazmul Karim   +6 more
wiley   +1 more source

Research on Wet Etching Techniques for GaInAs/AlInAs/InP Superlattices in Quantum Cascade Laser Fabrication

Nanomaterials
Wet etching is the mainstream fabrication method for single-bar quantum cascade lasers (QCLs). Different etching solutions result in varying etching effects on III-V semiconductor materials.
Shiya Zhang, Lianqing Zhu, Han Jia, Bingfeng Liu, Jintao Cui, Tuo Chen, Mingyu Li   +6 more
doaj   +1 more source