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High voltage, low pressure plasma enhanced atomic layer deposition

2020
openaire   +2 more sources

HEMTs with an AlxGa1-xN Barrier layer Grown by Plasma Enhanced Atomic Layer Deposition

2018
CHEN MIIN-JANG   +2 more
openaire   +2 more sources

Plasma enhanced atomic layer deposition of silicon-containing films

2008
THRIDANDAM HAREESH   +4 more
openaire   +1 more source
atomic layer deposition
atomic layer deposition ald
ald
physics
thin films
plasma enhanced atomic layer deposition
plasma-enhanced atomic layer deposition peald
aluminum nitride
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