Results 271 to 280 of about 5,812,653 (293)

SELECTIVE PLASMA ENHANCED ATOMIC LAYER DEPOSITION

2022
PEARLSTEIN RONALD M, LEI XINJIAN, RIDGEWAY ROBERT GORDON, WU AIPING, LEE YI-CHIA, AGARWAL SUMIT, RAMESH ROHIT NARAYANAN KAVASSERY, XU WANXING, GASVODA RYAN JAMES   +8 more
openaire   +1 more source

Thermal and plasma enhanced atomic layer deposition of SiO using commercial silicon precursors

Thin Solid Films, 2014
Simo-Pekka Hannula, Oili M.E. Ylivaara, Riikka L. Puurunen   +2 more
exaly  

Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2017
Christophe Vallée, Remy Gassilloud
exaly  

The role of plasma in plasma-enhanced atomic layer deposition of crystalline films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2020
Neeraj Nepal, Virginia Wheeler, David Boris   +2 more
exaly  

Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2019
Haibao Zhang, Zhongwei Liu, Lizhen Yang
exaly  

Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications

Applied Physics Letters, 2006
Ki-Bum Kim, Ki-Su Kim
exaly  

PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) APPARATUS

2020
PATSCHEIDER JÖRG, ROHRMANN HARTMUT, WEICHART JÜRGEN, BRITT FLORIAN   +3 more
openaire   +1 more source

Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2012
Markku Leskela, Marianna Kemell, Matti Putkonen   +2 more
exaly  

Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2005
Jane P. Chang
exaly  

Plasma-enhanced atomic layer deposition of vanadium nitride Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2019
Nicholas Strandwitz, Alexander Kozen, Guosong Zeng   +2 more
exaly