Results 271 to 280 of about 96,299 (290)

Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2020
Ali Mahmoodinezhad, Christoph Janowitz, Franziska Naumann   +2 more
exaly  

Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

Applied Catalysis B: Environmental, 2009
Jungwon Kim, Wonyong Choi, Hyungjun Kim
exaly  

An N‐Heterocyclic Carbene Based Silver Precursor for Plasma‐Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure

Angewandte Chemie - International Edition, 2018
Nils Boysen, Detlef Rogalla, Thomas Riedl   +2 more
exaly  

Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate

ACS Applied Materials & Interfaces, 2015
Sanghoon Ji, Gu Young Cho, Wonjong Yu
exaly  

Energy-enhanced atomic layer deposition for more process and precursor versatility

Coordination Chemistry Reviews, 2013
W M M Erwin Kessels
exaly  

Electrical and Corrosion Properties of Titanium Aluminum Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition

Journal of Materials Science and Technology, 2017
Se-Hun Kwon
exaly  

Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice

Nanomaterials, 2019
Hong-Ping, Jian-Guo Yang, Ji-Jun Feng
exaly  

?Characteristics of HfN Films Deposited by Remote Plasma-enhanced Atomic Layer Deposition

Journal of the Korean Physical Society, 2010
Wooho Jeong, Youngbin Ko, Seokhwan Bang, Seungjun Lee, Hyeongtag Jeon   +4 more
openaire   +1 more source

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Thin Solid Films, 2014
Matti Putkonen, Oili M E Ylivaara, Riikka L Puurunen   +2 more
exaly  

Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition

Journal of Applied Physics, 2005
Fukai Shan
exaly