Results 281 to 290 of about 96,299 (290)

Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2018
Saravana Balaji Basuvalingam, Bart Macco, Jimmy Melskens   +2 more
exaly  

Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2017
Rémy Gassilloud, Christophe Vallée
exaly  

Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications

Applied Surface Science, 2018
Dip K Nandi, Rahul Ramesh, Bonggeun Shong   +2 more
exaly  

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2011
exaly  

Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications

Applied Physics Letters, 2006
Ki-Bum Kim
exaly  

Plasma‐Enhanced Atomic Layer Deposition of Ultrathin Oxide Coatings for Stabilized Lithium–Sulfur Batteries

Advanced Energy Materials, 2013
Jung Tae Lee, Dong-Chan Lee, Alexandre Magasinski   +2 more
exaly  

XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition

Applied Surface Science, 2014
exaly  

Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition

Journal of Applied Physics, 2009
exaly  

Topographic Selective Deposition (TSD) by Combining Plasma Enhanced Atomic Layer Deposition and Atomic Layer Etching Processes

2021
Jaffal, Moustapha, Lefevre, Gauthier, Yeghoyan, Taguhi, Chevolleau, Thierry, Gassilloud, Rémy, Posseme, Nicolas, Bonvalot, Marceline   +6 more
openaire   +1 more source

Peculiarities of Doped GaP Layers Growth by Plasma Enhanced Atomic Layer Deposition

2019
Gudovskikh, Alexander S., Baranov, Artem, Morozov, Ivan, Uvarov, A., Kudryashov, Dmitriy A., Kleider, Jean-Paul   +5 more
openaire   +1 more source