Results 281 to 290 of about 5,812,653 (293)

Plasma-enhanced atomic layer deposition of titanium vanadium nitride

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2018
Nicholas Strandwitz, Alexander Kozen, Guosong Zeng   +2 more
exaly  

Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films

Applied Physics Letters, 2012
Mikko Ritala, Joshua D Caldwell, Jaakko Niinistö   +2 more
exaly  

Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co

Applied Physics Letters, 2007
Hyungjun Kim, Han-Bo-Ram Lee
exaly  

Effects of O plasma treatment on moisture barrier properties of SiO grown by plasma-enhanced atomic layer deposition

Ceramics International, 2019
Hyungjun Kim, Il-Kwon Oh, Seunggi Seo
exaly  

An N-Heterocyclic Carbene Based Silver Precursor for Plasma-Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure

Angewandte Chemie - International Edition, 2018
Detlef Rogalla, Nils Boysen, Thomas Riedl   +2 more
exaly  

Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2019
Kamira Weinfeld, Valentina Korchnoy, Yuanshen Qi   +2 more
exaly  

Topographic Selective Deposition (TSD) by Combining Plasma Enhanced Atomic Layer Deposition and Atomic Layer Etching Processes

2021
Jaffal, Moustapha, Lefevre, Gauthier, Yeghoyan, Taguhi, Chevolleau, Thierry, Gassilloud, Rémy, Posseme, Nicolas, Bonvalot, Marceline   +6 more
openaire   +1 more source

A PLASMA ENHANCED ATOMIC LAYER DEPOSITION SYSTEM AND METHOD

2007
openaire   +2 more sources

Apparatus and process for plasma-enhanced atomic layer deposition

2010
MA PAUL, SHAH KAVITA, WU DIEN-YEH, GANGULI SESHADRI, MARCADAL CHRISTOPHE, WU FREDERICK C, CHU SCHUBERT S   +6 more
openaire   +3 more sources

Optimization of Plasma-Enhanced Atomic Layer Deposition of Cobalt for Interconnects

2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Sandra Schujman, Natalya Tokranova, Van Long Nguyen, Christophe Vallée, Vidya Kaushik   +4 more
openaire   +1 more source