Results 51 to 60 of about 5,793,946 (166)

Recent Achievements for Flexible Encapsulation Films Based on Atomic/Molecular Layer Deposition

Micromachines
The purpose of this paper is to review the research progress in the realization of the organic–inorganic hybrid thin-film packaging of flexible organic electroluminescent devices using the PEALD (plasma-enhanced atomic layer deposition) and MLD ...
Buyue Zhang, Zhenyu Wang, Jintao Wang, Xinyu Chen   +3 more
doaj   +1 more source

Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition

, 2019
Aluminum nitride (AlN) films have been grown using novel technological approaches based on plasma-enhanced atomic layer deposition (PEALD) and in situ atomic layer annealing (ALA).
Ubyivovk, Evgeniy, Jarkko Etula, Lipsanen, Harri, Iurii Kim, Evgeniy Ubyivovk, Buravlev, Alexey, Heli Seppänen, Harri Lipsanen, Seppänen, Heli, Kim, Iurii, Etula, Jarkko, Alexei Bouravleuv   +11 more
core   +1 more source

Si Doping in Amorphous GaO_x Films via Plasma-Enhanced ALD for Dielectric and Optoelectronic Applications

IEEE Journal of the Electron Devices Society
Ga2O3 is a representative next-generation wide-bandgap semiconductor. Si doping in Ga2O3 plays a crucial role in optimizing performance and expanding applications.
Yongjie He, Jingxuan Wei, Jining Yang, Rongxu Bai, Qingqing Sun, Hao Zhu   +5 more
doaj   +1 more source

Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO₂ Coating

Micromachines, 2021
The chemical, structural, morphological, and optical properties of Al-doped TiO2 thin films, called TiO2/Al2O3 nanolaminates, grown by plasma-enhanced atomic layer deposition (PEALD) on p-type Si and commercial SLG glass were discussed.
William Chiappim, Giorgio Testoni, Felipe Miranda, Mariana Fraga, Humber Furlan, David Ardiles Saravia, Argemiro da Silva Sobrinho, Gilberto Petraconi, Homero Maciel, Rodrigo Pessoa   +9 more
doaj   +1 more source

Experimental Evidence for the Impact of Copper Microstructure on Residual Stress of Through Silicon Via

Advanced Electronic Materials, EarlyView.
The impact of Cu microstructure on the thermomechanical residual stress of TSVs with a diameter of 3 μm$\umu{\rm m}$ is investigated by comparing Raman stress imaging and EBSD grain characterization. By correlating Raman‐imaged TSV stress with Cu grain structure, direct experimental evidence is provided to highlight the direct correlation between ...
Shuhang Lyu, Thomas Beechem, Tiwei Wei
wiley   +1 more source

Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies [PDF]

, 2018
Oxide and nitride thin-films of Ti, Hf, and Si serve numerous applications owing to the diverse range of their material properties. It is therefore imperative to have proper control over these properties during materials processing.
Kessels, Wilhelmus M.M., Van Helvoirt, Cristian AA, Marcel A. Verheijen, Kessels, WMM Erwin, Saurabh Karwal (2297731), Hausmann, Dennis M., Sharma, A Akhil, Karwal, S, Mariadriana Creatore, Adriana Szeghalmi (18195), Creatore, Mariadriana, Faraz, T Tahsin, Mariadriana Creatore (1595581), Marcel A. Verheijen (1661299), Akhil Sharma (789195), Cristian A. A. van Helvoirt, Vivek Beladiya (5075888), Akhil Sharma, Beladiya, Vivek, Dennis M. Hausmann (3620957), Henri, Jon, Harm C. M. Knoops (1365795), Knoops, HCM Harm, Creatore, Mariadriana; id_orcid, Knoops, Harm C.M.; id_orcid, Hausmann, Dennis M, Faraz, Tahsin, Jon Henri, Van Helvoirt, Cristian A.A., Knoops, Harm C.M., Vivek Beladiya, Saurabh Karwal, Verheijen, Marcel A., Jon Henri (3620960), Cristian A. A. van Helvoirt (5075885), Verheijen, MA Marcel, Sharma, Akhil, Adriana Szeghalmi, Karwal, Saurabh, Harm C. M. Knoops, Wilhelmus M. M. Kessels, Wilhelmus M. M. Kessels (1365807), Creatore, M Adriana, Tahsin Faraz, Tahsin Faraz (3620954), Dennis M. Hausmann, Szeghalmi, Adriana   +46 more
core   +2 more sources

Wearable photovoltaic textiles: From device technologies to long‐term reliability

InfoScience, EarlyView.
Wearable photovoltaic textiles are highlighted as reliable energy sources that combine solar cell efficiency with hierarchical textile‐specific mechanical and environmental durability. Structural and encapsulation strategies, including planarization, neutral‐axis engineering, and advanced barrier designs, enable waterproofing, washability, UV shielding,
Eun Gyo Jeong, So Yeong Jeong, Yongmin Jeon, Myung Sub Lim, Seo‐Yoon Bae, Sung‐Min Lee   +5 more
wiley   +1 more source

Enhanced Ferroelectric Phase Formation via Local Structure Modification in the Pre‐Crystalline State of Hafnium Zirconium Oxide Thin Films

Advanced Functional Materials, Volume 36, Issue 80, 5 October 2026.
Hafnium zirconium oxide thin films are grown using plasma‐enhanced atomic layer deposition with the addition of an atomic layer annealing (ALA) step. ALA leads to a change in the short‐range structure of the deposit and encourages formation of the ferroelectric Pca21 phase. The result is wake‐up‐free performance with films exposed to ALA.
Nicolas K. Lam, Gerald R. Bejger, Waseem A. Wani, Kristina M. Holsgrove, Andrew N. Titus, Niyorjyoti Sharma, Shihao Wang, Keithen Orson, Megan K. Lenox, Liron Shvilberg, Yong Kyu Choi, Ian A. Brummel, Benjamin L. Aronson, Petra Reinke, Quentin Ramasse, Amit Kumar, Brian J. Rodriguez, Christina M. Rost, Jon F. Ihlefeld   +18 more
wiley   +1 more source

Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings

Nanomaterials, 2017
Plasma enhanced atomic layer deposition (PEALD) of silver nanoparticles on the surface of 1-D titania coatings, such as nanotubes (TNT) and nanoneedles (TNN), has been carried out.
Aleksandra Radtke, Tomasz Jędrzejewski, Wiesław Kozak, Beata Sadowska, Marzena Więckowska-Szakiel, Ewa Talik, Maarit Mäkelä, Markku Leskelä, Piotr Piszczek   +8 more
doaj   +1 more source

Unveiling Search‐Robust One‐Shot Learning Operation in FeTFT‐Based Ternary Content‐Addressable Memory

Small Science, Volume 6, Issue 10, October 2026.
In content‐addressable memory, stored data are searched far more often than they are written—yet search itself degrades the cell. A 2FeTFT ternary content‐addressable memory (TCAM) built on metal–ferroelectric–metal–insulator–semiconductor (MFMIS) ferroelectric thin‐film transistors reveals that gate‐dielectric choice governs how long the sensing ...
Hyeonjung Park, Changwoo Han, Yejoo Choi, Junseok Kim, Myeongjae Choi, Huiseong Shin, Seungjoon Jeong, Jeongheon Cho, Chaeho Kwon, Sang Min Won, Changhwan Shin   +10 more
wiley   +1 more source