Results 111 to 120 of about 95,287 (195)

Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry. [PDF]

Sci Rep, 2021
Kilic U, Mock A, Sekora D, Gilbert S, Valloppilly S, Melendez G, Ianno N, Langell M, Schubert E, Schubert M.   +9 more
europepmc   +1 more source

Investigation of Ga₂O₃-Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System. [PDF]

Sensors (Basel), 2020
Chu SY, Shen MX, Yeh TH, Chen CH, Lee CT, Lee HY.   +5 more
europepmc   +1 more source

Plasma enhanced atomic layer deposition of plasmonic TiN ultrathin films using TDMATi and NH₃. [PDF]

Materials (Basel), 2020
Hansen K, Cardona M, Dutta A, Yang C.
europepmc   +1 more source

Wafer-Scale Demonstration of BEOL-Compatible Ambipolar MoS₂ Devices Enabled by Plasma-Enhanced Atomic Layer Deposition. [PDF]

ACS Appl Mater Interfaces
Martínez A, Márquez C, Lorenzo F, Gutiérrez F, Caño-García M, Ávila J, Galdón Gil JC, Lopez RO, Navarro C, Donetti L, Gámiz F.   +10 more
europepmc   +1 more source

Structural, Optical and Electrical Properties of HfO₂ Thin Films Deposited at Low-Temperature Using Plasma-Enhanced Atomic Layer Deposition. [PDF]

Materials (Basel), 2020
Kim KM, Jang JS, Yoon SG, Yun JY, Chung NK.   +4 more
europepmc   +1 more source

Retraction of "N₂/H₂ Plasma-Enhanced Atomic Layer Deposition for SiO₂ Gap Filling: Implications for Nanoelectronics in Semiconductor Manufacturing". [PDF]

ACS Appl Nano Mater
Okasha S, Munson D, Yoshikawa J.
europepmc   +1 more source

Two-dimensional BN buffer for plasma enhanced atomic layer deposition of Al₂O₃ gate dielectrics on graphene field effect transistors. [PDF]

Sci Rep, 2020
Snure M, Vangala SR, Prusnick T, Grzybowski G, Crespo A, Leedy KD.   +5 more
europepmc   +1 more source

Improvement of Physical and Electrical Characteristics in 4H-SiC MOS Capacitors Using AlON Thin Films Fabricated via Plasma-Enhanced Atomic Layer Deposition. [PDF]

Materials (Basel)
Bai Z, Ding C, Guo Y, Luo M, Zhou Z, Gu L, Zhang Q, Ma H.   +7 more
europepmc   +1 more source

Relation Between Thickness and TFTs Properties of HfO₂ Dielectric Layer Synthesized by Plasma-Enhanced Atomic Layer Deposition. [PDF]

Nanomaterials (Basel)
Chen Q, Fu W, Han J, Zhang X, Lien SY.
europepmc   +1 more source

Tailoring Nickel Oxide Thin Films: Comparative Study of Oxidizing Agents in Thermal and Plasma-Enhanced Atomic Layer Deposition. [PDF]

ACS Omega
Hidrogo-Rico MA, Nedev N, Horley P, Mendívil MI, Castillo-Saenz J, Martínez-Guerra E, Juarez-Perez EJ, Aguirre-Tostado FS, Susarrey-Arce A, Martínez-Guerra E.   +9 more
europepmc   +1 more source