Results 171 to 180 of about 95,287 (195)

TRANSPARENT TITANIUM DIOXIDE THIN FILM DEPOSITED BY PLASMA-ENHANCED ATOMIC LAYER DEPOSITION

Integrated Ferroelectrics, 2006
ABSTRACT TiO2 thin films were deposited at 200°C on Si (100) and quartz substrates using plasma enhanced atomic layer deposition (PEALD) with alternating supply of reactant source, Ti[N(CH3)2]4, and oxygen plasma, and then were annealed at various temperatures in oxygen ambient using a rapid thermal annealing (RTA) system.
G. X. LIU, F. K. SHAN, W. J. LEE, G. H. LEE, I. S. KIM, B. C. SHIN, S. G. YOON, C. R. CHO   +7 more
openaire   +1 more source

WS2 p-MOSFETs with channels deposited by plasma-enhanced atomic-layer deposition

Applied Physics Letters
We report the demonstration of p-channel WS2 metal oxide field effect transistors (MOSFETs) using channels deposited by plasma-enhanced atomic layer deposition (PE-ALD). Substrate-gated devices using PE-ALD WS2 films deposited at 300 °C were fabricated with source-to-drain spacing, LDS, ranging from 0.1 to 1.1 µm. Despite being undoped, both 3.4-nm and
Ruixue Li, Rebecca A. Dawley, Shivanshu Mishra, Anil Adhikari, Ageeth A. Bol, Steven J. Koester   +5 more
openaire   +1 more source

Plasma enhanced atomic layer deposition of Ga

Journal of Materials Chemistry A, 2014
Ranjith K. Ramachandran, Jolien Dendooven, Jonas Botterman, Sreeprasanth Pulinthanathu Sree, Dirk Poelman, Johan A. Martens, Hilde Poelman, Christophe Detavernier   +7 more
openaire   +1 more source

Engineering the Atomic Interface with Single Platinum Atoms for Enhanced Photocatalytic Hydrogen Production

Angewandte Chemie - International Edition, 2020
Yuanjun Chen, Wenming Sun, Yong-Peng Lei
exaly  

Enhanced activation of molecular oxygen and degradation of tetracycline over Cu-S4 atomic clusters

Applied Catalysis B: Environmental, 2020
Shoutian Sun, Haodong Ji, Wen Liu
exaly  

Atomic-layer Fe2O3-modified 2D porphyrinic metal-organic framework for enhanced photocatalytic disinfection through electron-withdrawing effect

Applied Catalysis B: Environmental, 2022
Xiang-Mei Liu, Zhao-Yang Li, Sheng-Li Zhu   +2 more
exaly  

Dechlorination of triclosan by enhanced atomic hydrogen-mediated electrochemical reduction: Kinetics, mechanism, and toxicity assessment

Applied Catalysis B: Environmental, 2019
Jiuhui Qu
exaly  

Atomic interface effect of a single atom copper catalyst for enhanced oxygen reduction reactions

Energy and Environmental Science, 2019
Wenming Sun, Huishan Shang, Wenxing Chen
exaly  

Atomic Vacancies Control of Pd‐Based Catalysts for Enhanced Electrochemical Performance

Advanced Materials, 2018
Yunpeng Zuo, Dewei Rao, Tingting Li
exaly  

Hermetic seal for perovskite solar cells: An improved plasma enhanced atomic layer deposition encapsulation

Nano Energy, 2020
Yepin Zhao, Zipeng Zhao, Tae-Hee Han
exaly