Results 21 to 30 of about 17,661 (114)

Growth of GaN Thin Films Using Plasma Enhanced Atomic Layer Deposition: Effect of Ammonia-Containing Plasma Power on Residual Oxygen Capture. [PDF]

Int J Mol Sci, 2022
Jiang S, Wu WY, Ren F, Hsu CH, Zhang X, Gao P, Wuu DS, Huang CJ, Lien SY, Zhu W.   +9 more
europepmc   +1 more source

Bottom-up plasma-enhanced atomic layer deposition of SiO₂ by utilizing growth inhibition using NH₃ plasma pre-treatment for seamless gap-fill process. [PDF]

Sci Rep, 2022
Choi Y, Kim T, Lee H, Park J, Park J, Ryu D, Jeon W.   +6 more
europepmc   +1 more source

Effect of Process Temperature on Density and Electrical Characteristics of Hf_0.5Zr_0.5O₂ Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition. [PDF]

Nanomaterials (Basel), 2022
Kim HG, Hong DH, Yoo JH, Lee HC.
europepmc   +1 more source

Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films as an Effective Se Diffusion Barrier for CIGS Solar Cells. [PDF]

Nanomaterials (Basel), 2021
Woo HJ, Lee WJ, Koh EK, Jang SI, Kim S, Moon H, Kwon SH.   +6 more
europepmc   +1 more source

Superhigh energy storage density on-chip capacitors with ferroelectric Hf_0.5Zr_0.5O₂/antiferroelectric Hf_0.25Zr_0.75O₂ bilayer nanofilms fabricated by plasma-enhanced atomic layer deposition. [PDF]

Nanoscale Adv, 2022
He Y, Zheng G, Wu X, Liu WJ, Zhang DW, Ding SJ.   +5 more
europepmc   +1 more source

Highly Homogeneous Current Transport in Ultra-Thin Aluminum Nitride (AlN) Epitaxial Films on Gallium Nitride (GaN) Deposited by Plasma Enhanced Atomic Layer Deposition. [PDF]

Nanomaterials (Basel), 2021
Schilirò E, Giannazzo F, Di Franco S, Greco G, Fiorenza P, Roccaforte F, Prystawko P, Kruszewski P, Leszczynski M, Cora I, Pécz B, Fogarassy Z, Lo Nigro R.   +12 more
europepmc   +1 more source

Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO₂ Coating. [PDF]

Micromachines (Basel), 2021
Chiappim W, Testoni G, Miranda F, Miranda F, Fraga M, Furlan H, Saravia DA, Sobrinho ADS, Petraconi G, Maciel H, Pessoa R.   +10 more
europepmc   +1 more source

Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry. [PDF]

Sci Rep, 2021
Kilic U, Mock A, Sekora D, Gilbert S, Valloppilly S, Melendez G, Ianno N, Langell M, Schubert E, Schubert M.   +9 more
europepmc   +1 more source

Plasma enhanced atomic layer deposition of plasmonic TiN ultrathin films using TDMATi and NH₃. [PDF]

Materials (Basel), 2020
Hansen K, Cardona M, Dutta A, Yang C.
europepmc   +1 more source

Plasma-Enhanced Atomic Layer Deposition Synthesis of Nanolayered Molybdenum Diselenide (MoSe₂) Thin Films for Nanoelectronics. [PDF]

ACS Omega
Sanchez F, Giwa I, Chimba B, Xiao E, Kisslinger K, Nykypanchuk D, Tong X, Camino F, Monikandan R, Xiao Z.   +9 more
europepmc   +1 more source