Results 41 to 50 of about 17,661 (114)

Tailoring Nickel Oxide Thin Films: Comparative Study of Oxidizing Agents in Thermal and Plasma-Enhanced Atomic Layer Deposition. [PDF]

ACS Omega
Hidrogo-Rico MA, Nedev N, Horley P, Mendívil MI, Castillo-Saenz J, Martínez-Guerra E, Juarez-Perez EJ, Aguirre-Tostado FS, Susarrey-Arce A, Martínez-Guerra E.   +9 more
europepmc   +1 more source

Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry. [PDF]

Sci Rep, 2020
Kilic U, Mock A, Sekora D, Gilbert S, Valloppilly S, Melendez G, Ianno N, Langell M, Schubert E, Schubert M.   +9 more
europepmc   +1 more source

Effect of Precursor Purge Time on Plasma-Enhanced Atomic Layer Deposition-Prepared Ferroelectric Hf_0.5Zr_0.5O₂ Phase and Performance. [PDF]

ACS Omega
Choi YK, Holsgrove K, Watson A, Aronson BL, Lenox MK, Shvilberg L, Zhou C, Fields SS, Wang S, McDonnell SJ, Kumar A, Ihlefeld JF.   +11 more
europepmc   +1 more source

Biocompatible Co-organic Composite Thin Film Deposited by VHF Plasma-Enhanced Atomic Layer Deposition at a Low Temperature. [PDF]

ACS Omega
Yeom WK, Lee JW, Bae JA, Sung DI, Kim T, Lee JH, Yeom GY.   +6 more
europepmc   +1 more source

Dataset for TiN Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(dimethylamino)titanium (TDMAT) and Titanium Tetrachloride (TiCl₄) Precursor. [PDF]

Data Brief, 2020
Lee WJ, Yun EY, Lee HB, Hong SW, Kwon SH.   +4 more
europepmc   +1 more source

Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition. [PDF]

ACS Appl Mater Interfaces, 2019
Kim HJK, Kaplan KE, Schindler P, Xu S, Winterkorn MM, Heinz DB, English TS, Provine J, Prinz FB, Kenny TW.   +9 more
europepmc   +1 more source

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO₂ Using Carbon Dioxide. [PDF]

Nanoscale Res Lett, 2019
Zhu Z, Sippola P, Ylivaara OME, Modanese C, Di Sabatino M, Mizohata K, Merdes S, Lipsanen H, Savin H.   +8 more
europepmc   +1 more source

High-κ Dielectric on ReS₂: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al₂O₃. [PDF]

Materials (Basel), 2019
Khosravi A, Addou R, Catalano M, Kim J, Wallace RM.   +4 more
europepmc   +1 more source

Optoelectronic properties of CuO deposited by plasma-enhanced atomic layer deposition

Vacuum
Anne Haggrén, Gabriel Bartholazzi, Lachlan Watson, Daniel Macdonald, Kylie Catchpole, Lachlan Black   +5 more
openaire   +1 more source

Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)₂ as a Metal Precursor. [PDF]

Nanoscale Res Lett, 2019
Zhu B, Ding ZJ, Wu X, Liu WJ, Zhang DW, Ding SJ.   +5 more
europepmc   +1 more source