Results 31 to 40 of about 17,661 (114)

Investigation of Ga₂O₃-Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System. [PDF]

Sensors (Basel), 2020
Chu SY, Shen MX, Yeh TH, Chen CH, Lee CT, Lee HY.   +5 more
europepmc   +1 more source

A Liquid Ge(IV) Precursor for Low Temperature Plasma Enhanced Atomic Layer Deposition of Germanium Oxide Thin Films. [PDF]

Small
Preischel F, Rönnby K, Wilken M, Glauber JP, Froeschke S, Rogalla D, Gemming T, Popov AA, Dement P, Nolan M, Devi A.   +10 more
europepmc   +1 more source

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Cu Films Using Liquid Copper Precursor Bis(1-ethylmethylamino-2-propoxy)copper, Cu(emap)₂. [PDF]

ACS Omega
Nishida A, Yamashita A, Enzu M, Sakurai A, Matsuo Y.   +4 more
europepmc   +1 more source

Plasma-Enhanced Atomic Layer Deposition of AlF₃ Antireflective Coatings via Pulse-Time Control of Fluorine Radical Reactions. [PDF]

Nanomaterials (Basel)
Zhang J, Zhang Z, Hsu CH, Gao P, Qiu Y, Lin Y, Lien SY.   +6 more
europepmc   +1 more source

Wafer-Scale Demonstration of BEOL-Compatible Ambipolar MoS₂ Devices Enabled by Plasma-Enhanced Atomic Layer Deposition. [PDF]

ACS Appl Mater Interfaces
Martínez A, Márquez C, Lorenzo F, Gutiérrez F, Caño-García M, Ávila J, Galdón Gil JC, Lopez RO, Navarro C, Donetti L, Gámiz F.   +10 more
europepmc   +1 more source

Retraction of "N₂/H₂ Plasma-Enhanced Atomic Layer Deposition for SiO₂ Gap Filling: Implications for Nanoelectronics in Semiconductor Manufacturing". [PDF]

ACS Appl Nano Mater
Okasha S, Munson D, Yoshikawa J.
europepmc   +1 more source

Structural, Optical and Electrical Properties of HfO₂ Thin Films Deposited at Low-Temperature Using Plasma-Enhanced Atomic Layer Deposition. [PDF]

Materials (Basel), 2020
Kim KM, Jang JS, Yoon SG, Yun JY, Chung NK.   +4 more
europepmc   +1 more source

Improvement of Physical and Electrical Characteristics in 4H-SiC MOS Capacitors Using AlON Thin Films Fabricated via Plasma-Enhanced Atomic Layer Deposition. [PDF]

Materials (Basel)
Bai Z, Ding C, Guo Y, Luo M, Zhou Z, Gu L, Zhang Q, Ma H.   +7 more
europepmc   +1 more source

Two-dimensional BN buffer for plasma enhanced atomic layer deposition of Al₂O₃ gate dielectrics on graphene field effect transistors. [PDF]

Sci Rep, 2020
Snure M, Vangala SR, Prusnick T, Grzybowski G, Crespo A, Leedy KD.   +5 more
europepmc   +1 more source

Relation Between Thickness and TFTs Properties of HfO₂ Dielectric Layer Synthesized by Plasma-Enhanced Atomic Layer Deposition. [PDF]

Nanomaterials (Basel)
Chen Q, Fu W, Han J, Zhang X, Lien SY.
europepmc   +1 more source